{"_buckets": {"deposit": "d7fab185-b906-4df6-8d60-749b30e64a8d"}, "_deposit": {"id": "22879", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "22879"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00022879"}, "item_12_alternative_title_19": {"attribute_name": "\u305d\u306e\u4ed6\u306e\u8a00\u8a9e\u306e\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_alternative_title": "Study on Characteristics of Fluorocarbon Gas Plasma with Superposition of Radio Frequencies and Direct Current and Etching Mechanisms of SiO2 in Semiconductor Etching Equipment"}]}, "item_12_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2016-09-27", "bibliographicIssueDateType": "Issued"}, "bibliographic_titles": [{}]}]}, "item_12_date_granted_64": {"attribute_name": "\u5b66\u4f4d\u6388\u4e0e\u5e74\u6708\u65e5", "attribute_value_mlt": [{"subitem_dategranted": "2016-09-27"}]}, "item_12_degree_grantor_62": {"attribute_name": "\u5b66\u4f4d\u6388\u4e0e\u6a5f\u95a2", "attribute_value_mlt": [{"subitem_degreegrantor": [{"subitem_degreegrantor_name": "\u540d\u53e4\u5c4b\u5927\u5b66"}]}]}, "item_12_degree_name_61": {"attribute_name": "\u5b66\u4f4d\u540d", "attribute_value_mlt": [{"subitem_degreename": "\u535a\u58eb(\u5de5\u5b66)"}]}, "item_12_dissertation_number_65": {"attribute_name": "\u5b66\u4f4d\u6388\u4e0e\u756a\u53f7", "attribute_value_mlt": [{"subitem_dissertationnumber": "13901\u7532\u7b2c11602\u53f7"}]}, "item_12_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/25066"}]}, "item_12_select_15": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "ETD"}]}, "item_12_text_63": {"attribute_name": "\u5b66\u4f4d\u6388\u4e0e\u5e74\u5ea6", "attribute_value_mlt": [{"subitem_text_value": "2016"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "\u5927\u77e2, \u6b23\u4f38"}], "nameIdentifiers": [{"nameIdentifier": "67291", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-22"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "k11602_abstract.pdf", "filesize": [{"value": "262.7 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 262700.0, "url": {"label": "k11602_abstract.pdf ", "url": "https://nagoya.repo.nii.ac.jp/record/22879/files/k11602_abstract.pdf"}, "version_id": "d2d64a7b-0ea7-4338-be98-80e6f126ff48"}, {"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-22"}], "displaytype": "detail", "download_preview_message": "", "file_order": 1, "filename": "k11602_thesis.pdf", "filesize": [{"value": "6.1 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 6100000.0, "url": {"label": "k11602_thesis.pdf ", "url": "https://nagoya.repo.nii.ac.jp/record/22879/files/k11602_thesis.pdf"}, "version_id": "943339f3-f9cb-4ed8-81a0-9a22672af721"}, {"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-22"}], "displaytype": "detail", "download_preview_message": "", "file_order": 2, "filename": "k11602_review.pdf", "filesize": [{"value": "1.0 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 1000000.0, "url": {"label": "k11602_review.pdf ", "url": "https://nagoya.repo.nii.ac.jp/record/22879/files/k11602_review.pdf"}, "version_id": "74d3fd97-723b-406c-95bb-faeecbde648c"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "thesis", "resourceuri": "http://purl.org/coar/resource_type/c_46ec"}]}, "item_title": "\u534a\u5c0e\u4f53\u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e\u306b\u304a\u3051\u308b\u9ad8\u5468\u6ce2\u3068\u76f4\u6d41\u306e\u91cd\u7573\u5370\u52a0\u306b\u3088\u308b\u30d5\u30eb\u30aa\u30ed\u30ab\u30fc\u30dc\u30f3\u30ac\u30b9\u30d7\u30e9\u30ba\u30de\u306e\u7279\u6027\u53ca\u3073\u9178\u5316\u819c\u306e\u30a8\u30c3\u30c1\u30f3\u30b0\u30e1\u30ab\u30cb\u30ba\u30e0\u306b\u95a2\u3059\u308b\u7814\u7a76", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "\u534a\u5c0e\u4f53\u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e\u306b\u304a\u3051\u308b\u9ad8\u5468\u6ce2\u3068\u76f4\u6d41\u306e\u91cd\u7573\u5370\u52a0\u306b\u3088\u308b\u30d5\u30eb\u30aa\u30ed\u30ab\u30fc\u30dc\u30f3\u30ac\u30b9\u30d7\u30e9\u30ba\u30de\u306e\u7279\u6027\u53ca\u3073\u9178\u5316\u819c\u306e\u30a8\u30c3\u30c1\u30f3\u30b0\u30e1\u30ab\u30cb\u30ba\u30e0\u306b\u95a2\u3059\u308b\u7814\u7a76"}]}, "item_type_id": "12", "owner": "1", "path": ["320/606/607"], "permalink_uri": "http://hdl.handle.net/2237/25066", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_name_i18n": "\u516c\u958b\u65e5", "attribute_value": "2016-11-21"}, "publish_date": "2016-11-21", "publish_status": "0", "recid": "22879", "relation": {}, "relation_version_is_last": true, "title": ["\u534a\u5c0e\u4f53\u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e\u306b\u304a\u3051\u308b\u9ad8\u5468\u6ce2\u3068\u76f4\u6d41\u306e\u91cd\u7573\u5370\u52a0\u306b\u3088\u308b\u30d5\u30eb\u30aa\u30ed\u30ab\u30fc\u30dc\u30f3\u30ac\u30b9\u30d7\u30e9\u30ba\u30de\u306e\u7279\u6027\u53ca\u3073\u9178\u5316\u819c\u306e\u30a8\u30c3\u30c1\u30f3\u30b0\u30e1\u30ab\u30cb\u30ba\u30e0\u306b\u95a2\u3059\u308b\u7814\u7a76"], "weko_shared_id": null}