{"_buckets": {"deposit": "39950a15-c4ae-4f50-8326-559004d2cd36"}, "_deposit": {"id": "24182", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "24182"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00024182", "sets": ["607"]}, "author_link": ["71680", "71681"], "item_12_alternative_title_19": {"attribute_name": "その他のタイトル", "attribute_value_mlt": [{"subitem_alternative_title": "次世代パワーデバイスにおける窒化ガリウムの低ダメージ加工に向けた高温プラズマエッチングに関する研究", "subitem_alternative_title_language": "ja"}]}, "item_12_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2017-03-27", "bibliographicIssueDateType": "Issued"}}]}, "item_12_date_granted_64": {"attribute_name": "学位授与年月日", "attribute_value_mlt": [{"subitem_dategranted": "2017-03-27"}]}, "item_12_degree_grantor_62": {"attribute_name": "学位授与機関", "attribute_value_mlt": [{"subitem_degreegrantor": [{"subitem_degreegrantor_language": "ja", "subitem_degreegrantor_name": "名古屋大学"}, {"subitem_degreegrantor_language": "en", "subitem_degreegrantor_name": "Nagoya University"}], "subitem_degreegrantor_identifier": [{"subitem_degreegrantor_identifier_name": "13901", "subitem_degreegrantor_identifier_scheme": "kakenhi"}]}]}, "item_12_degree_name_61": {"attribute_name": "学位名", "attribute_value_mlt": [{"subitem_degreename": "博士(工学)", "subitem_degreename_language": "ja"}]}, "item_12_dissertation_number_65": {"attribute_name": "学位授与番号", "attribute_value_mlt": [{"subitem_dissertationnumber": "甲第11890号"}]}, "item_12_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/26580"}]}, "item_12_select_15": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_select_item": "ETD"}]}, "item_12_text_63": {"attribute_name": "学位授与年度", "attribute_value_mlt": [{"subitem_text_value": "2016"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "open access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_abf2"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "LIU, Zecheng", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "71680", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "劉, 沢鋮", "creatorNameLang": "ja"}], "nameIdentifiers": [{"nameIdentifier": "71681", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-22"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "k11890_thesis.pdf", "filesize": [{"value": "4.1 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 4099999.9999999995, "url": {"label": "k11890_thesis.pdf ", "objectType": "fulltext", "url": "https://nagoya.repo.nii.ac.jp/record/24182/files/k11890_thesis.pdf"}, "version_id": "45ac4651-db79-4dff-b3bf-24c8517cf4ca"}, {"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-22"}], "displaytype": "detail", "download_preview_message": "", "file_order": 1, "filename": "k11890_abstract.pdf", "filesize": [{"value": "210.0 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 210000.0, "url": {"label": "k11890_abstract.pdf ", "objectType": "abstract", "url": "https://nagoya.repo.nii.ac.jp/record/24182/files/k11890_abstract.pdf"}, "version_id": "0879b1f0-f120-443a-a5de-ba65e9971bbb"}, {"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-22"}], "displaytype": "detail", "download_preview_message": "", "file_order": 2, "filename": "k11890_review.pdf", "filesize": [{"value": "106.3 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 106300.0, "url": {"label": "k11890_review.pdf ", "objectType": "other", "url": "https://nagoya.repo.nii.ac.jp/record/24182/files/k11890_review.pdf"}, "version_id": "ee3d2704-64b4-45c9-abe1-40edca6523fa"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "doctoral thesis", "resourceuri": "http://purl.org/coar/resource_type/c_db06"}]}, "item_title": "Study on plasma etching of GaN at high temperatures for damageless fabrication of next-generation power devices", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Study on plasma etching of GaN at high temperatures for damageless fabrication of next-generation power devices", "subitem_title_language": "en"}]}, "item_type_id": "12", "owner": "1", "path": ["607"], "permalink_uri": "http://hdl.handle.net/2237/26580", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2017-06-06"}, "publish_date": "2017-06-06", "publish_status": "0", "recid": "24182", "relation": {}, "relation_version_is_last": true, "title": ["Study on plasma etching of GaN at high temperatures for damageless fabrication of next-generation power devices"], "weko_shared_id": -1}