WEKO3
アイテム
Spatial profiles of interelectrode electron density in direct current superposed dual-frequency capacitively coupled plasmas
http://hdl.handle.net/2237/26587
http://hdl.handle.net/2237/26587d5e1f7fe-69cd-495e-8d45-e95ed4a0a9d5
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
paper_ohya_acceptedmanuscript.pdf ファイル公開：2018/04/01 (806.7 kB)
|
|
| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-06-07 | |||||
| タイトル | ||||||
| タイトル | Spatial profiles of interelectrode electron density in direct current superposed dual-frequency capacitively coupled plasmas | |||||
| 言語 | en | |||||
| 著者 |
Ohya, Yoshinobu
× Ohya, Yoshinobu× Ishikawa, Kenji× Komuro, Tatsuya× Yamaguchi, Tsuyoshi× Takeda, Keigo× Kondo, Hiroki× Sekine, Makoto× Hori, Masaru |
|||||
| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 権利 | ||||||
| 言語 | en | |||||
| 権利情報 | “This is an author-created, un-copyedited version of an article accepted for publication/published in [Journal of Physics D: Applied Physics]. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at [https://doi.org/10.1088/1361-6463/aa60f7]” | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We present experimentally determined spatial profiles of the interelectrode electron density (n e) in dual-frequency capacitively coupled plasmas in which the negative direct current (dc) bias voltage (V dc) is superposed; in the experiment, 13 MHz (P low) was applied to the lower electrode and 60 MHz (P high) to the upper electrode. The bulk n e increased substantially with increases in the external power, P high, P low, and with increases in V dc. When P low was insufficient, the bulk n e decreased as the V dc bias increased. The bulk n e increased due to its dependence on V dc, especially for |V dc| > 500 V. This may correspond to the sheath voltages (V s) of the lower electrode. The n e values in front of the upper electrode were coupled with the V dc: the V dc dependence first decreased and then increased. The dc currents (I dc) of the upper electrode were collected when a large P low was applied. The value of I dc at the threshold value of V dc ≈ V s (e.g. −500 V) increased with an increase in n e. When |V dc| exceeded the threshold, the spatial n e profile and the I dc dependence were changed relative to the electrical characteristics of the dc superposition; this led to a change in the location of the maximum n e, the width of the area of n e depletion in front of the electrodes, and a transition in the electron heating modes. | |||||
| 言語 | en | |||||
| 出版者 | ||||||
| 出版者 | IOP publishing | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 出版タイプ | ||||||
| 出版タイプ | AM | |||||
| 出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1088/1361-6463/aa60f7 | |||||
| ISSN | ||||||
| 収録物識別子タイプ | PISSN | |||||
| 収録物識別子 | 0022-3727 | |||||
| 書誌情報 |
en : Journal of Physics D: Applied Physics 巻 50, 号 15, p. 155201-155201, 発行日 2017-04 |
|||||
| 著者版フラグ | ||||||
| 値 | author | |||||
| URI | ||||||
| 識別子 | https://doi.org/10.1088/1361-6463/aa60f7 | |||||
| 識別子タイプ | DOI | |||||
| URI | ||||||
| 識別子 | http://hdl.handle.net/2237/26587 | |||||
| 識別子タイプ | HDL | |||||
