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  1. B200 工学部/工学研究科
  2. B200d 学位論文
  3. 博士論文(工博・論工博)

スロット励起高密度マイクロ波プラズマの生成と樹脂表面処理への応用に関する研究

http://hdl.handle.net/2237/00027710
90acd3ae-1489-4f39-898b-5e133864b8d1
名前 / ファイル ライセンス アクション
K12294_abstract.pdf K12294_abstract (270.3 kB)
k12294_review.pdf k12294_review (171.0 kB)
k12294_summary.pdf k12294_summary (205.0 kB)
k12294_thesis.pdf k12294_thesis (4.8 MB)
Item type 学位論文 / Thesis or Dissertation(1)
公開日 2018-04-05
タイトル
タイトル スロット励起高密度マイクロ波プラズマの生成と樹脂表面処理への応用に関する研究
その他のタイトル
その他のタイトル Study on Production of High Density Microwave Plasma with Slot-excited Antenna and its Application to Polymer Surface Treatment
著者 笹井, 建典

× 笹井, 建典

WEKO 75763

笹井, 建典

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内容記述
内容記述 主論文ファイル公開2019年6月19日
内容記述タイプ Other
言語
言語 jpn
資源タイプ
資源 http://purl.org/coar/resource_type/c_46ec
タイプ thesis
書誌情報 発行日 2018-03-26
学位名
学位名 博士(工学)
学位授与機関
学位授与機関名
学位授与機関名 名古屋大学
学位授与年度
学位授与年度 2017
学位授与年月日
学位授与年月日 2018-03-26
学位授与番号
学位授与番号 13901甲第12294号
著者版フラグ
値 ETD
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