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Study on Etched Profile Control and the Surface Reaction for Organic Material Plasma Etching
http://hdl.handle.net/2237/00029942
http://hdl.handle.net/2237/000299420a828ab4-69b5-4ff2-b612-1290000dd32b
名前 / ファイル | ライセンス | アクション |
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Item type | 学位論文 / Thesis or Dissertation(1) | |||||
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公開日 | 2019-04-04 | |||||
タイトル | ||||||
タイトル | Study on Etched Profile Control and the Surface Reaction for Organic Material Plasma Etching | |||||
言語 | en | |||||
その他のタイトル | ||||||
その他のタイトル | 有機物のプラズマエッチングにおけるエッチング形状制御とその表面反応に関する研究 | |||||
言語 | ja | |||||
著者 |
FUKUNAGA, Yusuke
× FUKUNAGA, Yusuke× 福永, 裕介 |
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アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_db06 | |||||
タイプ | doctoral thesis | |||||
書誌情報 |
発行日 2019-03-25 |
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学位名 | ||||||
言語 | ja | |||||
学位名 | 博士(工学) | |||||
学位授与機関 | ||||||
学位授与機関識別子Scheme | kakenhi | |||||
学位授与機関識別子 | 13901 | |||||
言語 | ja | |||||
学位授与機関名 | 名古屋大学 | |||||
言語 | en | |||||
学位授与機関名 | Nagoya University | |||||
学位授与年度 | ||||||
学位授与年度 | 2018 | |||||
学位授与年月日 | ||||||
学位授与年月日 | 2019-03-25 | |||||
学位授与番号 | ||||||
学位授与番号 | 甲第12767号 | |||||
著者版フラグ | ||||||
値 | ETD |