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Material removal efficiency improvement by orientation control of CMP pad surface asperities
http://hdl.handle.net/2237/00032647
http://hdl.handle.net/2237/00032647f067bba1-c3cf-4d2e-93cb-ce4a4963a6f4
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
PRE_2019_715_Original_V0 (2.2 MB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2020-09-17 | |||||
| タイトル | ||||||
| タイトル | Material removal efficiency improvement by orientation control of CMP pad surface asperities | |||||
| 言語 | en | |||||
| 著者 |
Suzuki, Norikazu
× Suzuki, Norikazu× Misono, Hirotaka× Shamoto, Eiji× Hashimoto, Yohei× Yasuda, Hozumi× Mochizuki, Yoshihiro |
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| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 権利 | ||||||
| 言語 | en | |||||
| 権利情報 | © 2020. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/ | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Polishing | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Dress | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Conditioning | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Surface asperity | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Feret's diameter | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Polishing pad | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | This paper presents a novel method of improving material removal efficiency in the chemical mechanical polishing (CMP) process by optimizing the surface asperity orientation with respect to polishing motion. Feret's diameter plays a key role in increasing the number of working abrasives. Based on Feret's diameter model, an optimization method is proposed for the conditioning motion of a diamond dresser against a CMP pad. The radial velocity component of the dresser on the CMP pad is maximized by considering its direction of motion based on kinematic motion simulation. In addition, the pad cut rate profile is optimized to be uniform. Analytical and experimental investigations show that the ratio of radial and tangential velocity components is improved, yielding a larger Feret's diameter and 15% increase in the material removal rate. | |||||
| 言語 | en | |||||
| 内容記述 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | ファイル公開日: 2022/03/01 | |||||
| 言語 | ja | |||||
| 出版者 | ||||||
| 出版者 | Elsevier | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 出版タイプ | ||||||
| 出版タイプ | AM | |||||
| 出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1016/j.precisioneng.2019.11.008 | |||||
| ISSN（print） | ||||||
| 収録物識別子タイプ | PISSN | |||||
| 収録物識別子 | 0141-6359 | |||||
| 書誌情報 |
en : Precision Engineering 巻 62, p. 83-88, 発行日 2020-03 |
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| 著者版フラグ | ||||||
| 値 | author | |||||
