{"_buckets": {"deposit": "5489cb62-4a5e-4dfc-8855-83bd7b4ae42b"}, "_deposit": {"id": "30535", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "30535"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00030535"}, "item_10_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2020-06", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "SJ", "bibliographicPageStart": "SJJB03", "bibliographicVolumeNumber": "59", "bibliographic_titles": [{"bibliographic_title": "Japanese Journal of Applied Physics"}]}]}, "item_10_description_4": {"attribute_name": "\u6284\u9332", "attribute_value_mlt": [{"subitem_description": "Absolute values of the surface charge densities at the top and bottom of a capillary plate (CP) placed on a powered electrode were evaluated under the influence of pulse-modulated very high frequency (40 MHz) plasma. The peak-to-peak voltage at the top and bottom of the CP was measured using a high-voltage probe; this voltage was carefully calibrated, removing the influence of probe impedance. Based on the peak-to-peak voltage, the capacitances of the sheath and the CP were evaluated. Based on the average voltage, the surface charge density was evaluated for the plasma-on and off phases. A charge density of the order of 10^\u22125 C m^\u22122 was obtained at the bottom of the CP. Furthermore, two important observations were made during the plasma-off phase, namely: conservation of the surface charge density at the bottom of the CP and presence of the residual negative surface charge at the top of the CP.", "subitem_description_type": "Abstract"}]}, "item_10_description_5": {"attribute_name": "\u5185\u5bb9\u8a18\u8ff0", "attribute_value_mlt": [{"subitem_description": "\u30d5\u30a1\u30a4\u30eb\u516c\u958b\uff1a2021-06-01", "subitem_description_type": "Other"}]}, "item_10_publisher_32": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "IOP publishing"}]}, "item_10_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type_id": {"subitem_relation_type_id_text": "https://doi.org/10.35848/1347-4065/ab85af", "subitem_relation_type_select": "DOI"}}]}, "item_10_rights_12": {"attribute_name": "\u6a29\u5229", "attribute_value_mlt": [{"subitem_rights": "This is an author-created, un-copyedited version of an article published in {Japanese Journal of Applied Physics}. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at {https://doi.org/10.35848/1347-4065/ab85af}.\u3000\u201cThis Accepted Manuscript is available for reuse under a CC BY-NC-ND 4.0 licence after the 12 month embargo period provided that all the terms of the licence are adhered to\u201d"}]}, "item_10_select_15": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "author"}]}, "item_10_source_id_61": {"attribute_name": "ISSN\uff08print\uff09", "attribute_value_mlt": [{"subitem_source_identifier": "0021-4922", "subitem_source_identifier_type": "ISSN"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Moriyama, Makoto"}], "nameIdentifiers": [{"nameIdentifier": "101623", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Nakahara, Naoya"}], "nameIdentifiers": [{"nameIdentifier": "101624", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Mitsuya, Akihiro"}], "nameIdentifiers": [{"nameIdentifier": "101625", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Suzuki, Haruka"}], "nameIdentifiers": [{"nameIdentifier": "101626", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kurihara, Kazuaki"}], "nameIdentifiers": [{"nameIdentifier": "101627", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Iino, Daiki"}], "nameIdentifiers": [{"nameIdentifier": "101628", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Fukumizu, Hiroyuki"}], "nameIdentifiers": [{"nameIdentifier": "101629", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Toyoda, Hirotaka"}], "nameIdentifiers": [{"nameIdentifier": "101630", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2021-06-01"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "VHF_Chargeup__Moriyama_20200319.pdf", "filesize": [{"value": "565.9 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 565900.0, "url": {"label": "VHF_Chargeup__Moriyama_20200319", "url": "https://nagoya.repo.nii.ac.jp/record/30535/files/VHF_Chargeup__Moriyama_20200319.pdf"}, "version_id": "1b4060e1-3a6a-4fad-9f09-c7a953fbbd86"}]}, "item_keyword": {"attribute_name": "\u30ad\u30fc\u30ef\u30fc\u30c9", "attribute_value_mlt": [{"subitem_subject": "high-aspect hole", "subitem_subject_scheme": "Other"}, {"subitem_subject": "charge-up", "subitem_subject_scheme": "Other"}, {"subitem_subject": "VHF plasma", "subitem_subject_scheme": "Other"}, {"subitem_subject": "charge density", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Evaluation of absolute charge density at the bottom of high aspect capillary holes exposed to a pulsed very high frequency plasma", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "Evaluation of absolute charge density at the bottom of high aspect capillary holes exposed to a pulsed very high frequency plasma"}]}, "item_type_id": "10", "owner": "1", "path": ["320/321/322"], "permalink_uri": "http://hdl.handle.net/2237/00032720", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_value": "2020-10-13"}, "publish_date": "2020-10-13", "publish_status": "0", "recid": "30535", "relation": {}, "relation_version_is_last": true, "title": ["Evaluation of absolute charge density at the bottom of high aspect capillary holes exposed to a pulsed very high frequency plasma"], "weko_shared_id": null}