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Characteristics of C_3 radicals in high-density C_4F_8 plasmas studied by laser-induced fluorescence spectroscopy
http://hdl.handle.net/2237/7037
http://hdl.handle.net/2237/70370565cc98-baef-4bd1-b2fe-4185c6033bac
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
JApplPhys_88_6201.pdf (260.7 kB)
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| アイテムタイプ | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2006-10-24 | |||||
| タイトル | ||||||
| タイトル | Characteristics of C_3 radicals in high-density C_4F_8 plasmas studied by laser-induced fluorescence spectroscopy | |||||
| 言語 | en | |||||
| 著者 |
Takizawa, K.
× Takizawa, K.× Sasaki, K.× Kadota, K. |
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| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 権利 | ||||||
| 権利情報 | Copyright (2000) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. | |||||
| 言語 | en | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Spatial and temporal variations of C_3 density in high-density octafluorocyclobutane (c-C_4F_8) plasmas were examined using laser-induced fluorescence spectroscopy. The C_3 density varied slowly for a long time after the initiation of discharge, suggesting the importance of surface chemistry for the formation of C_3 . Hollow-shaped spatial distributions (the C_3 density adjacent to the chamber wall was higher than that in the plasma column) were observed in the C_3 density. This result indicates that C_3 radicals are produced from fluorocarbon film on the chamber wall and are lost in the plasma column due to electron impact processes. The surface production of C_3 was also observed in the afterglow for 1 ms after the termination of rf power. The decay time constant of the C_3 density in the late (>1 ms) afterglow, where the surface production of C_3 stopped, was almost independent of discharge parameters, suggesting that the loss of C_3 due to gas-phase reactions is negligible. | |||||
| 言語 | en | |||||
| 出版者 | ||||||
| 出版者 | American Institute of Physics | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 出版タイプ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1063/1.1321029 | |||||
| ISSN | ||||||
| 収録物識別子タイプ | PISSN | |||||
| 収録物識別子 | 0021-8979 | |||||
| 書誌情報 |
en : Journal of Applied Physics 巻 88, 号 11, p. 6201-6206, 発行日 2000-12-01 |
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| フォーマット | ||||||
| 値 | application/pdf | |||||
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| 値 | publisher | |||||
| URI | ||||||
| 識別子 | http://hdl.handle.net/2237/7037 | |||||
| 識別子タイプ | HDL | |||||
