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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Spatial distribution of the absolute densities of CF_x radicals in fluorocarbon plasmas determined from single-path infrared laser absorption and laser-induced fluorescence

http://hdl.handle.net/2237/7039
http://hdl.handle.net/2237/7039
1a698878-2ccb-4222-bf06-f3a2bbb40c3e
名前 / ファイル ライセンス アクション
JApplPhys_90_580.pdf JApplPhys_90_580.pdf (167.2 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2006-10-24
タイトル
タイトル Spatial distribution of the absolute densities of CF_x radicals in fluorocarbon plasmas determined from single-path infrared laser absorption and laser-induced fluorescence
言語 en
著者 Nakamura, Masayuki

× Nakamura, Masayuki

WEKO 13951

en Nakamura, Masayuki

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Hori, Masaru

× Hori, Masaru

WEKO 13952

en Hori, Masaru

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Goto, Toshio

× Goto, Toshio

WEKO 13953

en Goto, Toshio

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Ito, Masafumi

× Ito, Masafumi

WEKO 13954

en Ito, Masafumi

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Ishii, Nobuo

× Ishii, Nobuo

WEKO 13955

en Ishii, Nobuo

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 Copyright (2001) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
抄録
内容記述 The spatial distribution of the absolute density of CF_x (x=1 – 3) radicals and their translational temperatures in an electron cyclotron resonance (ECR) plasma generated from a tetrafluorocarbon (C_4F_8) gas were examined using infrared diode-laser absorption spectroscopy (IRLAS) without a multiple reflection cell, namely, single-path IRLAS. Furthermore, we have developed a method of measuring CF and CF_2 radical densities using single-path IRLAS combined with laser-induced fluorescence (LIF) spectroscopy. This method enables us to measure the spatial distribution of absolute radical densities with high accuracy, because of the IRLAS infrared laser beam and the LIF ultraviolet laser beam having identical paths. Under all the conditions studied, a spatially hollow distribution of the CF_2 radical density is formed; the CF_2 radical density in the vicinity of the chamber wall is much higher than that in the plasma. However, the spatial distribution of the CF radical density differs greatly from that of the CF 2 radical density. The translational temperatures of CF and CF_2 radicals are evaluated to be ~700 K. On the basis of the measured results, we clarify the mechanisms of the formation of the spatial distribution, and conclude that the hollow distribution of the CF_2 radical density is not caused by radical generation from the chamber wall, rather, the dominant mechanism for the formation of this distribution is the electron-impact dissociation of C_4F_8 gas in the ECR region and diffusion from the upper part of the plasma chamber under the present plasma conditions where the flux of ions incident to the chamber wall is low.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 American Institute of Physics
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1063/1.1337090
ISSN
収録物識別子タイプ PISSN
収録物識別子 0021-8979
書誌情報 en : Journal of Applied Physics

巻 90, 号 2, p. 580-586, 発行日 2001-07-15
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/7039
識別子タイプ HDL
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