{"_buckets": {"deposit": "22a829e9-8752-4d6b-ba51-5b431d40a5b1"}, "_deposit": {"id": "5493", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "5493"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00005493"}, "item_10_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2003-07", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "7", "bibliographicPageEnd": "3459", "bibliographicPageStart": "3453", "bibliographicVolumeNumber": "74", "bibliographic_titles": [{"bibliographic_title": "Review of Scientific Instruments"}]}]}, "item_10_description_4": {"attribute_name": "\u6284\u9332", "attribute_value_mlt": [{"subitem_description": "The compact measurement system for absolute density of oxygen (O) atom has been developed, which employs a vacuum ultraviolet absorption spectroscopy (VUVAS) technique with a high-pressure microdischarge hollow cathode lamp (MHCL) as a light source. The influences of self-absorption, emission line profile of the MHCL, and background absorption of oxygen molecule (O_2) on the determination of absolute O atom density were taken into consideration. This system has been applied for measuring absolute O atom densities in an inductively coupled O_2 plasma. O atom densities were estimated to be on the order of 1*10^12\u20131*10^13 cm^-3 at an input power of 100 W and an O_2 pressure ranging from 1.3 to 26.7 Pa. The behavior of O atom density measured using VUVAS technique was consistent with that obtained by actinometry technique using O emission intensities of 844.6 nm and 777.4 nm lines. Moreover, the lifetime of O atom in the afterglow plasma has been measured. The decay curves of the O atom density were fitted with exponential functions. The extinction process of O atom in the inductively coupled O_2 plasma has been discussed.", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/7098"}]}, "item_10_publisher_32": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "American Institute of Physics"}]}, "item_10_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type_id": {"subitem_relation_type_id_text": "http://dx.doi.org/10.1063/1.1582386", "subitem_relation_type_select": "DOI"}}]}, "item_10_rights_12": {"attribute_name": "\u6a29\u5229", "attribute_value_mlt": [{"subitem_rights": "Copyright (2003) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics."}]}, "item_10_select_15": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0034-6748", "subitem_source_identifier_type": "ISSN"}]}, "item_10_text_14": {"attribute_name": "\u30d5\u30a9\u30fc\u30de\u30c3\u30c8", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Nagai, Hisao"}], "nameIdentifiers": [{"nameIdentifier": "14175", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Hiramatsu, Mineo"}], "nameIdentifiers": [{"nameIdentifier": "14176", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Hori, Masaru"}], "nameIdentifiers": [{"nameIdentifier": "14177", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Goto, Toshio"}], "nameIdentifiers": [{"nameIdentifier": "14178", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-19"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "RevSciInstrum_74_3453.pdf", "filesize": [{"value": "224.5 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 224500.0, "url": {"label": "RevSciInstrum_74_3453.pdf", "url": "https://nagoya.repo.nii.ac.jp/record/5493/files/RevSciInstrum_74_3453.pdf"}, "version_id": "4c8bcc51-2323-475b-85b4-f8d41ceca181"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Measurement of oxygen atom density employing vacuum ultraviolet absorption spectroscopy with microdischarge hollow cathode lamp", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "Measurement of oxygen atom density employing vacuum ultraviolet absorption spectroscopy with microdischarge hollow cathode lamp"}]}, "item_type_id": "10", "owner": "1", "path": ["320/321/322"], "permalink_uri": "http://hdl.handle.net/2237/7098", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_value": "2006-10-30"}, "publish_date": "2006-10-30", "publish_status": "0", "recid": "5493", "relation": {}, "relation_version_is_last": true, "title": ["Measurement of oxygen atom density employing vacuum ultraviolet absorption spectroscopy with microdischarge hollow cathode lamp"], "weko_shared_id": 3}