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Measurement of oxygen atom density employing vacuum ultraviolet absorption spectroscopy with microdischarge hollow cathode lamp
http://hdl.handle.net/2237/7098
1997c1f7-5f4a-4684-b6cc-c98e3308ad39
名前 / ファイル | ライセンス | アクション | |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2006-10-30 | |||||
タイトル | ||||||
タイトル | Measurement of oxygen atom density employing vacuum ultraviolet absorption spectroscopy with microdischarge hollow cathode lamp | |||||
著者 |
Nagai, Hisao
× Nagai, Hisao× Hiramatsu, Mineo× Hori, Masaru× Goto, Toshio |
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権利 | ||||||
権利情報 | Copyright (2003) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. | |||||
抄録 | ||||||
内容記述 | The compact measurement system for absolute density of oxygen (O) atom has been developed, which employs a vacuum ultraviolet absorption spectroscopy (VUVAS) technique with a high-pressure microdischarge hollow cathode lamp (MHCL) as a light source. The influences of self-absorption, emission line profile of the MHCL, and background absorption of oxygen molecule (O_2) on the determination of absolute O atom density were taken into consideration. This system has been applied for measuring absolute O atom densities in an inductively coupled O_2 plasma. O atom densities were estimated to be on the order of 1*10^12–1*10^13 cm^-3 at an input power of 100 W and an O_2 pressure ranging from 1.3 to 26.7 Pa. The behavior of O atom density measured using VUVAS technique was consistent with that obtained by actinometry technique using O emission intensities of 844.6 nm and 777.4 nm lines. Moreover, the lifetime of O atom in the afterglow plasma has been measured. The decay curves of the O atom density were fitted with exponential functions. The extinction process of O atom in the inductively coupled O_2 plasma has been discussed. | |||||
内容記述タイプ | Abstract | |||||
出版者 | ||||||
出版者 | American Institute of Physics | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
DOI | ||||||
関連識別子 | ||||||
識別子タイプ | DOI | |||||
関連識別子 | http://dx.doi.org/10.1063/1.1582386 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0034-6748 | |||||
書誌情報 |
Review of Scientific Instruments 巻 74, 号 7, p. 3453-3459, 発行日 2003-07 |
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フォーマット | ||||||
application/pdf | ||||||
著者版フラグ | ||||||
値 | publisher | |||||
URI | ||||||
識別子 | http://hdl.handle.net/2237/7098 | |||||
識別子タイプ | HDL |