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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Measurement of oxygen atom density employing vacuum ultraviolet absorption spectroscopy with microdischarge hollow cathode lamp

http://hdl.handle.net/2237/7098
1997c1f7-5f4a-4684-b6cc-c98e3308ad39
名前 / ファイル ライセンス アクション
RevSciInstrum_74_3453.pdf RevSciInstrum_74_3453.pdf (224.5 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2006-10-30
タイトル
タイトル Measurement of oxygen atom density employing vacuum ultraviolet absorption spectroscopy with microdischarge hollow cathode lamp
著者 Nagai, Hisao

× Nagai, Hisao

WEKO 14175

Nagai, Hisao

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Hiramatsu, Mineo

× Hiramatsu, Mineo

WEKO 14176

Hiramatsu, Mineo

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Hori, Masaru

× Hori, Masaru

WEKO 14177

Hori, Masaru

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Goto, Toshio

× Goto, Toshio

WEKO 14178

Goto, Toshio

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権利
権利情報 Copyright (2003) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
抄録
内容記述 The compact measurement system for absolute density of oxygen (O) atom has been developed, which employs a vacuum ultraviolet absorption spectroscopy (VUVAS) technique with a high-pressure microdischarge hollow cathode lamp (MHCL) as a light source. The influences of self-absorption, emission line profile of the MHCL, and background absorption of oxygen molecule (O_2) on the determination of absolute O atom density were taken into consideration. This system has been applied for measuring absolute O atom densities in an inductively coupled O_2 plasma. O atom densities were estimated to be on the order of 1*10^12–1*10^13 cm^-3 at an input power of 100 W and an O_2 pressure ranging from 1.3 to 26.7 Pa. The behavior of O atom density measured using VUVAS technique was consistent with that obtained by actinometry technique using O emission intensities of 844.6 nm and 777.4 nm lines. Moreover, the lifetime of O atom in the afterglow plasma has been measured. The decay curves of the O atom density were fitted with exponential functions. The extinction process of O atom in the inductively coupled O_2 plasma has been discussed.
内容記述タイプ Abstract
出版者
出版者 American Institute of Physics
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
DOI
関連識別子
識別子タイプ DOI
関連識別子 http://dx.doi.org/10.1063/1.1582386
ISSN
収録物識別子タイプ ISSN
収録物識別子 0034-6748
書誌情報 Review of Scientific Instruments

巻 74, 号 7, p. 3453-3459, 発行日 2003-07
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/7098
識別子タイプ HDL
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