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Transition from Electrostatic to Electromagnetic Mode in Atmospheric Pressure RF Ar Inductively Coupled Plasma
http://hdl.handle.net/2237/7110
http://hdl.handle.net/2237/711087046336-c415-4d04-9c6a-4ac868c825e6
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
icops2003.pdf (9.7 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2006-11-24 | |||||
| タイトル | ||||||
| タイトル | Transition from Electrostatic to Electromagnetic Mode in Atmospheric Pressure RF Ar Inductively Coupled Plasma | |||||
| 言語 | en | |||||
| 著者 |
Razzak, M. A.
× Razzak, M. A.× Kondo, K.× Uesugi, Y.× Takamura, S. |
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| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 権利 | ||||||
| 言語 | en | |||||
| 権利情報 | Copyright © 2003 IEEE. Reprinted from Plasma Science, 2003. ICOPS 2003. p.446. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. | |||||
| 出版者 | ||||||
| 出版者 | IEEE | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 出版タイプ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1109/PLASMA.2003.1230027 | |||||
| ISSN | ||||||
| 収録物識別子タイプ | PISSN | |||||
| 収録物識別子 | 0730-9244 | |||||
| 書誌情報 |
en : The 30th International Conference on Plasma Science (ICOPS 2003) IEEE Conference Record - Abstracts p. 446-446, 発行日 2003 |
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| フォーマット | ||||||
| 値 | application/pdf | |||||
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| 値 | publisher | |||||
| URI | ||||||
| 識別子 | http://hdl.handle.net/2237/7110 | |||||
| 識別子タイプ | HDL | |||||
