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Transition of electron heating mode in a planar microwave discharge at low pressures
http://hdl.handle.net/2237/7248
http://hdl.handle.net/2237/72480405571e-701a-47f8-a823-7bb493d833b4
名前 / ファイル | ライセンス | アクション |
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ApplPhysLett_77_3523.pdf (168.5 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2007-01-15 | |||||
タイトル | ||||||
タイトル | Transition of electron heating mode in a planar microwave discharge at low pressures | |||||
言語 | en | |||||
著者 |
Sugai, H.
× Sugai, H.× Ghanashev, I.× Mizuno, K. |
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アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
権利 | ||||||
言語 | en | |||||
権利情報 | Copyright (2000) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. | |||||
抄録 | ||||||
内容記述 | Spatial distributions of electron density n_e , electron temperature T_e , and wave field intensity in a planar microwave discharge at low pressures (10–100 mTorr) are measured with the discharge power as a parameter. Two different modes of electron heating are found: a bulk heating mode characterized with high T_e(~10 eV) in underdense plasma, and a surface heating mode with low T_e(~3 eV) in overdense plasma with a hot layer near the plasma-dielectric boundary. Abrupt transition between the two modes takes place near the cutoff density n_c where the electron plasma frequency coincides with the discharge frequency (2.45 GHz). In the underdense case (n_e<n_c), the microwave penetrates the bulk plasma and heats the majority of electrons confined in the dc ambipolar potential well, leading to high T_e . In the overdense case (n_e>n_c), the evanescent wave (surface wave) near the microwave window strongly heats the electrons in the boundary layer, which are transported to the bulk region and ionize the neutral particles to therein produce relatively cold electrons. | |||||
言語 | en | |||||
内容記述タイプ | Abstract | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | American Institute of Physics | |||||
言語 | ||||||
言語 | eng | |||||
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資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
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出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1063/1.1329322 | |||||
ISSN | ||||||
収録物識別子タイプ | PISSN | |||||
収録物識別子 | 0003-6951 | |||||
書誌情報 |
en : Applied Physics Letters 巻 77, 号 22, p. 3523-3525, 発行日 2000-11-27 |
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application/pdf | ||||||
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値 | publisher | |||||
URI | ||||||
識別子 | http://hdl.handle.net/2237/7248 | |||||
識別子タイプ | HDL |