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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Transition of electron heating mode in a planar microwave discharge at low pressures

http://hdl.handle.net/2237/7248
http://hdl.handle.net/2237/7248
0405571e-701a-47f8-a823-7bb493d833b4
名前 / ファイル ライセンス アクション
ApplPhysLett_77_3523.pdf ApplPhysLett_77_3523.pdf (168.5 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2007-01-15
タイトル
タイトル Transition of electron heating mode in a planar microwave discharge at low pressures
言語 en
著者 Sugai, H.

× Sugai, H.

WEKO 14918

en Sugai, H.

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Ghanashev, I.

× Ghanashev, I.

WEKO 14919

en Ghanashev, I.

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Mizuno, K.

× Mizuno, K.

WEKO 14920

en Mizuno, K.

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アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 Copyright (2000) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
抄録
内容記述 Spatial distributions of electron density n_e , electron temperature T_e , and wave field intensity in a planar microwave discharge at low pressures (10–100 mTorr) are measured with the discharge power as a parameter. Two different modes of electron heating are found: a bulk heating mode characterized with high T_e(~10 eV) in underdense plasma, and a surface heating mode with low T_e(~3 eV) in overdense plasma with a hot layer near the plasma-dielectric boundary. Abrupt transition between the two modes takes place near the cutoff density n_c where the electron plasma frequency coincides with the discharge frequency (2.45 GHz). In the underdense case (n_e<n_c), the microwave penetrates the bulk plasma and heats the majority of electrons confined in the dc ambipolar potential well, leading to high T_e . In the overdense case (n_e>n_c), the evanescent wave (surface wave) near the microwave window strongly heats the electrons in the boundary layer, which are transported to the bulk region and ionize the neutral particles to therein produce relatively cold electrons.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 American Institute of Physics
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1063/1.1329322
ISSN
収録物識別子タイプ PISSN
収録物識別子 0003-6951
書誌情報 en : Applied Physics Letters

巻 77, 号 22, p. 3523-3525, 発行日 2000-11-27
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/7248
識別子タイプ HDL
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