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  1. B200 工学部/工学研究科
  2. B200e 会議資料
  3. 国際会議

Micromachined Sealed Cavities by Silicon Wafer Bonding for the Formation of Microstructures of Desired Thickness Using TMAH Etching

http://hdl.handle.net/2237/12096
0fc4bce8-fc19-4676-86c0-7a20c5914314
名前 / ファイル ライセンス アクション
08_MHS_Prem.pdf 08_MHS_Prem.pdf (1.2 MB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2009-08-26
タイトル
タイトル Micromachined Sealed Cavities by Silicon Wafer Bonding for the Formation of Microstructures of Desired Thickness Using TMAH Etching
著者 Pal, Prem

× Pal, Prem

WEKO 31153

Pal, Prem

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Sato, Kazuo

× Sato, Kazuo

WEKO 31154

Sato, Kazuo

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権利
権利情報 Copyright © 2008 IEEE. Reprinted from International Symposium on Micro-NanoMechatronics and Human Science, 2008. MHS 2008. p.12-16.
This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org.
抄録
内容記述 The present research report a fabrication process of suspended silicon microstructures of desired thickness over controlled depth micromachined cavities. The process is developed using
direct wafer bonding to seal the micromachined cavities and wet anisotropic etching in pure and
surfactant added tetramethyl ammonium hydroxide (TMAH) solutions. Wet anisotropic etching is
used for the formation of cavities, thinning down the wafer for structural layer and releasing
the structures. Non-ionic surfactant Triton-X-100 [C_14H_22O(C_2H_4O)_n] added TMAH is used to
realize the microstructures with rounded concave and sharp convex corners.
内容記述タイプ Abstract
出版者
出版者 IEEE
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
書誌情報 International Symposium on Micro-NanoMechatronics and Human Science (MHS 2008)

p. 12-16, 発行日 2008-11
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://dx.doi.org/10.1109/MHS.2008.4752414
識別子タイプ DOI
URI
識別子 http://hdl.handle.net/2237/12096
識別子タイプ HDL
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