{"_buckets": {"deposit": "d23f2908-c33b-40b9-a3d6-caab29d33307"}, "_deposit": {"id": "10788", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "10788"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00010788", "sets": ["675"]}, "author_link": ["32403", "32404", "32405", "32406", "32407", "32408", "32409", "32410"], "item_10_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2009-05-13", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "19", "bibliographicPageEnd": "191104", "bibliographicPageStart": "191104", "bibliographicVolumeNumber": "94", "bibliographic_titles": [{"bibliographic_title": "APPLIED PHYSICS LETTERS", "bibliographic_titleLang": "en"}]}]}, "item_10_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "We have developed a laser terahertz emission microscope utilizing excitation laser pulses at 1.06 μm wavelength for the inspection and localization of electrical failures in large-scale integrated circuits with multilayered interconnection structures. The system enables to measure terahertz emission images from the backside of a large-scale integrated circuits chip with a multilayered interconnection structure that prevents the observation from the front side. By comparing the terahertz emission images, we successfully distinguish a normal circuit from damaged ones with different positions of the interconnection defects without any electrical probing.", "subitem_description_language": "en", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/12631"}, {"subitem_identifier_type": "DOI", "subitem_identifier_uri": "http://dx.doi.org/10.1063/1.3133346"}]}, "item_10_publisher_32": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "American Institite of Physics", "subitem_publisher_language": "en"}]}, "item_10_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isVersionOf", "subitem_relation_type_id": {"subitem_relation_type_id_text": "https://doi.org/10.1063/1.3133346", "subitem_relation_type_select": "DOI"}}]}, "item_10_rights_12": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. 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