WEKO3
アイテム
{"_buckets": {"deposit": "d23f2908-c33b-40b9-a3d6-caab29d33307"}, "_deposit": {"id": "10788", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "10788"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00010788", "sets": ["675"]}, "author_link": ["32403", "32404", "32405", "32406", "32407", "32408", "32409", "32410"], "item_10_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2009-05-13", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "19", "bibliographicPageEnd": "191104", "bibliographicPageStart": "191104", "bibliographicVolumeNumber": "94", "bibliographic_titles": [{"bibliographic_title": "APPLIED PHYSICS LETTERS", "bibliographic_titleLang": "en"}]}]}, "item_10_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "We have developed a laser terahertz emission microscope utilizing excitation laser pulses at 1.06 μm wavelength for the inspection and localization of electrical failures in large-scale integrated circuits with multilayered interconnection structures. The system enables to measure terahertz emission images from the backside of a large-scale integrated circuits chip with a multilayered interconnection structure that prevents the observation from the front side. By comparing the terahertz emission images, we successfully distinguish a normal circuit from damaged ones with different positions of the interconnection defects without any electrical probing.", "subitem_description_language": "en", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/12631"}, {"subitem_identifier_type": "DOI", "subitem_identifier_uri": "http://dx.doi.org/10.1063/1.3133346"}]}, "item_10_publisher_32": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "American Institite of Physics", "subitem_publisher_language": "en"}]}, "item_10_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isVersionOf", "subitem_relation_type_id": {"subitem_relation_type_id_text": "https://doi.org/10.1063/1.3133346", "subitem_relation_type_select": "DOI"}}]}, "item_10_rights_12": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior per mission of the author and the American Institute of Physics.", "subitem_rights_language": "en"}]}, "item_10_select_15": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0003-6951", "subitem_source_identifier_type": "PISSN"}]}, "item_10_text_14": {"attribute_name": "フォーマット", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}]}, "item_1615787544753": {"attribute_name": "出版タイプ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "open access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_abf2"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Yamashita, Masatsugu", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32403", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Otani, Chiko", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32404", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kawase, Kodo", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32405", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Matsumoto, Toru", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32406", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Nikawa, Kiyoshi", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32407", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kim, Sunmi", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32408", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Murakami, Hironaru", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32409", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Tonouchi, Masayoshi", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32410", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-20"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "ApplPhysLett_94_191104.pdf", "filesize": [{"value": "443.3 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 443300.0, "url": {"label": "ApplPhysLett_94_191104.pdf", "objectType": "fulltext", "url": "https://nagoya.repo.nii.ac.jp/record/10788/files/ApplPhysLett_94_191104.pdf"}, "version_id": "6c2cc79f-7ceb-46ad-b21d-3459e4c5f266"}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "failure analysis", "subitem_subject_scheme": "Other"}, {"subitem_subject": "high-speed optical techniques", "subitem_subject_scheme": "Other"}, {"subitem_subject": "integrated circuit interconnections", "subitem_subject_scheme": "Other"}, {"subitem_subject": "integrated circuit testing", "subitem_subject_scheme": "Other"}, {"subitem_subject": "large scale integration", "subitem_subject_scheme": "Other"}, {"subitem_subject": "submillimetre wave imaging", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Backside observation of large-scale integrated circuits with multilayered interconnections using laser terahertz emission microscope", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Backside observation of large-scale integrated circuits with multilayered interconnections using laser terahertz emission microscope", "subitem_title_language": "en"}]}, "item_type_id": "10", "owner": "1", "path": ["675"], "permalink_uri": "http://hdl.handle.net/2237/12631", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2010-01-21"}, "publish_date": "2010-01-21", "publish_status": "0", "recid": "10788", "relation": {}, "relation_version_is_last": true, "title": ["Backside observation of large-scale integrated circuits with multilayered interconnections using laser terahertz emission microscope"], "weko_shared_id": -1}
Backside observation of large-scale integrated circuits with multilayered interconnections using laser terahertz emission microscope
http://hdl.handle.net/2237/12631
http://hdl.handle.net/2237/12631b132b830-274f-4401-94bb-6e63efb15ea9
名前 / ファイル | ライセンス | アクション |
---|---|---|
ApplPhysLett_94_191104.pdf (443.3 kB)
|
|
Item type | 学術雑誌論文 / Journal Article(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2010-01-21 | |||||
タイトル | ||||||
タイトル | Backside observation of large-scale integrated circuits with multilayered interconnections using laser terahertz emission microscope | |||||
言語 | en | |||||
著者 |
Yamashita, Masatsugu
× Yamashita, Masatsugu× Otani, Chiko× Kawase, Kodo× Matsumoto, Toru× Nikawa, Kiyoshi× Kim, Sunmi× Murakami, Hironaru× Tonouchi, Masayoshi |
|||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
権利 | ||||||
言語 | en | |||||
権利情報 | Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior per mission of the author and the American Institute of Physics. | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | failure analysis | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | high-speed optical techniques | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | integrated circuit interconnections | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | integrated circuit testing | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | large scale integration | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | submillimetre wave imaging | |||||
抄録 | ||||||
内容記述 | We have developed a laser terahertz emission microscope utilizing excitation laser pulses at 1.06 μm wavelength for the inspection and localization of electrical failures in large-scale integrated circuits with multilayered interconnection structures. The system enables to measure terahertz emission images from the backside of a large-scale integrated circuits chip with a multilayered interconnection structure that prevents the observation from the front side. By comparing the terahertz emission images, we successfully distinguish a normal circuit from damaged ones with different positions of the interconnection defects without any electrical probing. | |||||
言語 | en | |||||
内容記述タイプ | Abstract | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | American Institite of Physics | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1063/1.3133346 | |||||
ISSN | ||||||
収録物識別子タイプ | PISSN | |||||
収録物識別子 | 0003-6951 | |||||
書誌情報 |
en : APPLIED PHYSICS LETTERS 巻 94, 号 19, p. 191104-191104, 発行日 2009-05-13 |
|||||
フォーマット | ||||||
application/pdf | ||||||
著者版フラグ | ||||||
値 | publisher | |||||
URI | ||||||
識別子 | http://hdl.handle.net/2237/12631 | |||||
識別子タイプ | HDL | |||||
URI | ||||||
識別子 | http://dx.doi.org/10.1063/1.3133346 | |||||
識別子タイプ | DOI |