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{"_buckets": {"deposit": "d23f2908-c33b-40b9-a3d6-caab29d33307"}, "_deposit": {"id": "10788", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "10788"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00010788", "sets": ["675"]}, "author_link": ["32403", "32404", "32405", "32406", "32407", "32408", "32409", "32410"], "item_10_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2009-05-13", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "19", "bibliographicPageEnd": "191104", "bibliographicPageStart": "191104", "bibliographicVolumeNumber": "94", "bibliographic_titles": [{"bibliographic_title": "APPLIED PHYSICS LETTERS", "bibliographic_titleLang": "en"}]}]}, "item_10_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "We have developed a laser terahertz emission microscope utilizing excitation laser pulses at 1.06 μm wavelength for the inspection and localization of electrical failures in large-scale integrated circuits with multilayered interconnection structures. The system enables to measure terahertz emission images from the backside of a large-scale integrated circuits chip with a multilayered interconnection structure that prevents the observation from the front side. By comparing the terahertz emission images, we successfully distinguish a normal circuit from damaged ones with different positions of the interconnection defects without any electrical probing.", "subitem_description_language": "en", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/12631"}, {"subitem_identifier_type": "DOI", "subitem_identifier_uri": "http://dx.doi.org/10.1063/1.3133346"}]}, "item_10_publisher_32": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "American Institite of Physics", "subitem_publisher_language": "en"}]}, "item_10_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isVersionOf", "subitem_relation_type_id": {"subitem_relation_type_id_text": "https://doi.org/10.1063/1.3133346", "subitem_relation_type_select": "DOI"}}]}, "item_10_rights_12": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior per mission of the author and the American Institute of Physics.", "subitem_rights_language": "en"}]}, "item_10_select_15": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0003-6951", "subitem_source_identifier_type": "PISSN"}]}, "item_10_text_14": {"attribute_name": "フォーマット", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}]}, "item_1615787544753": {"attribute_name": "出版タイプ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "open access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_abf2"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Yamashita, Masatsugu", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32403", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Otani, Chiko", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32404", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kawase, Kodo", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32405", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Matsumoto, Toru", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32406", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Nikawa, Kiyoshi", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32407", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kim, Sunmi", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32408", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Murakami, Hironaru", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32409", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Tonouchi, Masayoshi", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32410", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-20"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "ApplPhysLett_94_191104.pdf", "filesize": [{"value": "443.3 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 443300.0, "url": {"label": "ApplPhysLett_94_191104.pdf", "objectType": "fulltext", "url": "https://nagoya.repo.nii.ac.jp/record/10788/files/ApplPhysLett_94_191104.pdf"}, "version_id": "6c2cc79f-7ceb-46ad-b21d-3459e4c5f266"}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "failure analysis", "subitem_subject_scheme": "Other"}, {"subitem_subject": "high-speed optical techniques", "subitem_subject_scheme": "Other"}, {"subitem_subject": "integrated circuit interconnections", "subitem_subject_scheme": "Other"}, {"subitem_subject": "integrated circuit testing", "subitem_subject_scheme": "Other"}, {"subitem_subject": "large scale integration", "subitem_subject_scheme": "Other"}, {"subitem_subject": "submillimetre wave imaging", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Backside observation of large-scale integrated circuits with multilayered interconnections using laser terahertz emission microscope", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Backside observation of large-scale integrated circuits with multilayered interconnections using laser terahertz emission microscope", "subitem_title_language": "en"}]}, "item_type_id": "10", "owner": "1", "path": ["675"], "permalink_uri": "http://hdl.handle.net/2237/12631", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2010-01-21"}, "publish_date": "2010-01-21", "publish_status": "0", "recid": "10788", "relation": {}, "relation_version_is_last": true, "title": ["Backside observation of large-scale integrated circuits with multilayered interconnections using laser terahertz emission microscope"], "weko_shared_id": -1}
  1. F200 未来材料・システム研究所
  2. F200a 雑誌掲載論文
  3. 学術雑誌

Backside observation of large-scale integrated circuits with multilayered interconnections using laser terahertz emission microscope

http://hdl.handle.net/2237/12631
http://hdl.handle.net/2237/12631
b132b830-274f-4401-94bb-6e63efb15ea9
名前 / ファイル ライセンス アクション
ApplPhysLett_94_191104.pdf ApplPhysLett_94_191104.pdf (443.3 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2010-01-21
タイトル
タイトル Backside observation of large-scale integrated circuits with multilayered interconnections using laser terahertz emission microscope
言語 en
著者 Yamashita, Masatsugu

× Yamashita, Masatsugu

WEKO 32403

en Yamashita, Masatsugu

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Otani, Chiko

× Otani, Chiko

WEKO 32404

en Otani, Chiko

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Kawase, Kodo

× Kawase, Kodo

WEKO 32405

en Kawase, Kodo

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Matsumoto, Toru

× Matsumoto, Toru

WEKO 32406

en Matsumoto, Toru

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Nikawa, Kiyoshi

× Nikawa, Kiyoshi

WEKO 32407

en Nikawa, Kiyoshi

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Kim, Sunmi

× Kim, Sunmi

WEKO 32408

en Kim, Sunmi

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Murakami, Hironaru

× Murakami, Hironaru

WEKO 32409

en Murakami, Hironaru

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Tonouchi, Masayoshi

× Tonouchi, Masayoshi

WEKO 32410

en Tonouchi, Masayoshi

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior per mission of the author and the American Institute of Physics.
キーワード
主題Scheme Other
主題 failure analysis
キーワード
主題Scheme Other
主題 high-speed optical techniques
キーワード
主題Scheme Other
主題 integrated circuit interconnections
キーワード
主題Scheme Other
主題 integrated circuit testing
キーワード
主題Scheme Other
主題 large scale integration
キーワード
主題Scheme Other
主題 submillimetre wave imaging
抄録
内容記述 We have developed a laser terahertz emission microscope utilizing excitation laser pulses at 1.06 μm wavelength for the inspection and localization of electrical failures in large-scale integrated circuits with multilayered interconnection structures. The system enables to measure terahertz emission images from the backside of a large-scale integrated circuits chip with a multilayered interconnection structure that prevents the observation from the front side. By comparing the terahertz emission images, we successfully distinguish a normal circuit from damaged ones with different positions of the interconnection defects without any electrical probing.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 American Institite of Physics
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1063/1.3133346
ISSN
収録物識別子タイプ PISSN
収録物識別子 0003-6951
書誌情報 en : APPLIED PHYSICS LETTERS

巻 94, 号 19, p. 191104-191104, 発行日 2009-05-13
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/12631
識別子タイプ HDL
URI
識別子 http://dx.doi.org/10.1063/1.3133346
識別子タイプ DOI
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