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Structure Modification of M-AFM Probe for the Measurement of Local Conductivity
http://hdl.handle.net/2237/14489
http://hdl.handle.net/2237/1448962a4661a-7c9e-4312-b547-95563805cfb4
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
1056.pdf (573.2 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2011-02-25 | |||||
| タイトル | ||||||
| タイトル | Structure Modification of M-AFM Probe for the Measurement of Local Conductivity | |||||
| 言語 | en | |||||
| 著者 |
Fujimoto, Akifumi
× Fujimoto, Akifumi× Zhang, Lan× Hosoi, Atsushi× Ju, Yang |
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| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 権利 | ||||||
| 言語 | en | |||||
| 権利情報 | © 2011 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | In order to realize the evaluation of electrical properties of materials in nanoscale orders, a method for the measurement of local conductivity was presented. A microwave atomic force microscope (M-AFM) probe in which microwave signals can propagate was fabricated. An open structure of a waveguide at the tip of the probe was introduced by focused ion beam (FIB) fabrication. The microwave measurement system consisted of the combination of a network analyzer working at 44.5 GHz and an AFM were used to measure the samples without contact. The amplitude and phase of the reflection coefficient of the microwave signal were measured to determine the electrical conductivity of non magnetic metals. The conductivity obtained by this method agrees with that measured by the high-frequency conductometry. | |||||
| 言語 | en | |||||
| 出版者 | ||||||
| 出版者 | IEEE | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 出版タイプ | ||||||
| 出版タイプ | AM | |||||
| 出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
| ISBN | ||||||
| 関連タイプ | isPartOf | |||||
| 識別子タイプ | ISBN | |||||
| 関連識別子 | 978-1-4244-6636-8 | |||||
| 関連情報 | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | URI | |||||
| 関連識別子 | http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5486451&isnumber=5486443 | |||||
| 書誌情報 |
en : Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP) p. 22-26, 発行日 2010 |
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| 著者版フラグ | ||||||
| 値 | author | |||||
| URI | ||||||
| 識別子 | http://hdl.handle.net/2237/14489 | |||||
| 識別子タイプ | HDL | |||||
| URI | ||||||
| 識別子 | http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5486451&isnumber=5486443 | |||||
| 識別子タイプ | URI | |||||
