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  1. B200 工学部/工学研究科
  2. B200d 学位論文
  3. 博士論文(工博・論工博)

容量結合型プラズマ中における高アスペクト比ホール底部のチャージアップ挙動に関する研究

http://hdl.handle.net/2237/0002000420
95dbc905-a84f-4c77-af37-84f7bb465fb3
名前 / ファイル ライセンス アクション
k13609_abstract.pdf k13609_abstract.pdf (2.6 MB)
k13609_review.pdf k13609_review.pdf (154 KB)
k13609_thesis.pdf k13609_thesis.pdf (9.5 MB)
Item type itemtype_ver1(1)
公開日 2021-08-12
タイトル
タイトル 容量結合型プラズマ中における高アスペクト比ホール底部のチャージアップ挙動に関する研究
言語 ja
その他のタイトル
その他のタイトル Study on the charge-up behavior at the bottom of high-aspect ratio holes in a capacitively coupled plasma
言語 en
著者 森山, 誠

× 森山, 誠

ja 森山, 誠

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
言語
言語 jpn
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_db06
タイプ doctoral thesis
書誌情報
発行日 2021-03-25
学位名
言語 ja
学位名 博士(工学)
学位授与機関
学位授与機関識別子
学位授与機関識別子Scheme kakenhi
学位授与機関識別子 13901
学位授与機関名
言語 ja
学位授与機関名 名古屋大学
学位授与機関名
言語 en
学位授与機関名 NAGOYA University
学位授与年度
学位授与年度 2020
学位授与年月日
学位授与年月日 2021-03-25
学位授与番号
学位授与番号 甲第13609号
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