{"_buckets": {"deposit": "34cb474c-b509-465b-9ff2-1a637006f642"}, "_deposit": {"id": "2000420", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "2000420"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:02000420", "sets": ["607"]}, "author_link": [], "control_number": "2000420", "item_1619764877189": {"attribute_name": "学位名", "attribute_value_mlt": [{"subitem_degreename": "博士(工学)", "subitem_degreename_language": "ja"}]}, "item_1619764903829": {"attribute_name": "学位授与機関", "attribute_value_mlt": [{"subitem_degreegrantor": [{"subitem_degreegrantor_language": "ja", "subitem_degreegrantor_name": "名古屋大学"}, {"subitem_degreegrantor_language": "en", "subitem_degreegrantor_name": "NAGOYA University"}], "subitem_degreegrantor_identifier": [{"subitem_degreegrantor_identifier_name": "13901", "subitem_degreegrantor_identifier_scheme": "kakenhi"}]}]}, "item_1619764932197": {"attribute_name": "学位授与年度", "attribute_value_mlt": [{"subitem_text_value": "2020"}]}, "item_1619764970493": {"attribute_name": "学位授与年月日", "attribute_value_mlt": [{"subitem_dategranted": "2021-03-25"}]}, "item_1619765001901": {"attribute_name": "学位授与番号", "attribute_value_mlt": [{"subitem_dissertationnumber": "甲第13609号"}]}, "item_9_alternative_title_19": {"attribute_name": "その他のタイトル", "attribute_value_mlt": [{"subitem_alternative_title": "Study on the charge-up behavior at the bottom of high-aspect ratio holes in a capacitively coupled plasma", "subitem_alternative_title_language": "en"}]}, "item_9_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2021-03-25", "bibliographicIssueDateType": "Issued"}}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "open access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_abf2"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "森山, 誠", "creatorNameLang": "ja"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_access", "date": [{"dateType": "Available", "dateValue": "2021-08-12"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "k13609_abstract.pdf", "filesize": [{"value": "2.6 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "mimetype": "application/pdf", "size": 2600000.0, "url": {"objectType": "abstract", "url": "https://nagoya.repo.nii.ac.jp/record/2000420/files/k13609_abstract.pdf"}, "version_id": "8badfec9-10e2-47d0-ac94-d6550cc05f60"}, {"accessrole": "open_access", "date": [{"dateType": "Available", "dateValue": "2021-08-12"}], "displaytype": "detail", "download_preview_message": "", "file_order": 1, "filename": "k13609_review.pdf", "filesize": [{"value": "154 KB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "mimetype": "application/pdf", "size": 154000.0, "url": {"objectType": "other", "url": "https://nagoya.repo.nii.ac.jp/record/2000420/files/k13609_review.pdf"}, "version_id": "82dbb06b-ddc3-4a19-a07b-eb152ccc9df1"}, {"accessrole": "open_access", "date": [{"dateType": "Available", "dateValue": "2021-08-12"}], "displaytype": "detail", "download_preview_message": "", "file_order": 2, "filename": "k13609_thesis.pdf", "filesize": [{"value": "9.5 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "mimetype": "application/pdf", "size": 9500000.0, "url": {"objectType": "fulltext", "url": "https://nagoya.repo.nii.ac.jp/record/2000420/files/k13609_thesis.pdf"}, "version_id": "3dcb9718-e141-459e-a2da-1548741bb200"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "doctoral thesis", "resourceuri": "http://purl.org/coar/resource_type/c_db06"}]}, "item_title": "容量結合型プラズマ中における高アスペクト比ホール底部のチャージアップ挙動に関する研究", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "容量結合型プラズマ中における高アスペクト比ホール底部のチャージアップ挙動に関する研究", "subitem_title_language": "ja"}]}, "item_type_id": "40001", "owner": "1", "path": ["607"], "permalink_uri": "http://hdl.handle.net/2237/0002000420", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2021-08-12"}, "publish_date": "2021-08-12", "publish_status": "0", "recid": "2000420", "relation": {}, "relation_version_is_last": true, "title": ["容量結合型プラズマ中における高アスペクト比ホール底部のチャージアップ挙動に関する研究"], "weko_shared_id": -1}