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High-speed deposition of graphite-like carbon film by Ar/C6H6 surface-wave plasma with high-voltage pulse biasing
http://hdl.handle.net/2237/0002002045
http://hdl.handle.net/2237/00020020452f66e2af-d6c1-49ae-a735-f85fda272821
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
Final_Version_bae.pdf (985 KB)
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| Item type | itemtype_ver1(1) | |||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 公開日 | 2022-02-08 | |||||||||||||
| タイトル | ||||||||||||||
| タイトル | High-speed deposition of graphite-like carbon film by Ar/C6H6 surface-wave plasma with high-voltage pulse biasing | |||||||||||||
| 言語 | en | |||||||||||||
| 著者 |
Bae, Hansin
× Bae, Hansin
× Sasai, Kensuke
× Suzuki, Haruka
× Toyoda, Hirotaka
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| アクセス権 | ||||||||||||||
| アクセス権 | open access | |||||||||||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||||||||||
| 権利 | ||||||||||||||
| 言語 | en | |||||||||||||
| 権利情報 | © 2021. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/ | |||||||||||||
| キーワード | ||||||||||||||
| 主題Scheme | Other | |||||||||||||
| 主題 | PECVD | |||||||||||||
| キーワード | ||||||||||||||
| 主題Scheme | Other | |||||||||||||
| 主題 | Carbon | |||||||||||||
| キーワード | ||||||||||||||
| 主題Scheme | Other | |||||||||||||
| 主題 | Conductive carbon film | |||||||||||||
| キーワード | ||||||||||||||
| 主題Scheme | Other | |||||||||||||
| 主題 | Microwave plasma | |||||||||||||
| キーワード | ||||||||||||||
| 主題Scheme | Other | |||||||||||||
| 主題 | Graphite-like carbon | |||||||||||||
| 内容記述 | ||||||||||||||
| 内容記述タイプ | Abstract | |||||||||||||
| 内容記述 | A method for graphite-like carbon (GLC) deposition using Ar/C6H6 surface-wave plasma (SWP) is proposed. Characteristic of the SWP, i.e., high plasma density with wide spatial uniformity realized uniform carbon film deposition at high deposition rates. To increase sp^2 ratio in carbon films, a pulsed negative bias voltage up to ~2 kV is applied to a substrate. Conductive carbon films of low sheet resistances below ~10^2 Ω/sq is achieved at high deposition rates up to ~6 nm/s with good spatial uniformity (5%) in an area of ~183 cm^2. Film structure is evaluated by Raman spectroscopy, Fourier-transform infra-red spectroscopy, X-ray diffraction, X-ray photoelectron spectroscopy, scanning transmission electron microscopy and electron energy loss spectroscopy. At high negative bias voltages, sp^2-rich with reduced hydrogen content of the film is observed. | |||||||||||||
| 言語 | en | |||||||||||||
| 出版者 | ||||||||||||||
| 出版者 | Elsevier | |||||||||||||
| 言語 | en | |||||||||||||
| 言語 | ||||||||||||||
| 言語 | eng | |||||||||||||
| 資源タイプ | ||||||||||||||
| 資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||||||||||
| タイプ | journal article | |||||||||||||
| 出版タイプ | ||||||||||||||
| 出版タイプ | AM | |||||||||||||
| 出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||||||||||
| 関連情報 | ||||||||||||||
| 関連タイプ | isVersionOf | |||||||||||||
| 識別子タイプ | DOI | |||||||||||||
| 関連識別子 | https://doi.org/10.1016/j.vacuum.2021.110429 | |||||||||||||
| 収録物識別子 | ||||||||||||||
| 収録物識別子タイプ | PISSN | |||||||||||||
| 収録物識別子 | 0042-207X | |||||||||||||
| 書誌情報 |
en : Vacuum 巻 192, p. 110429, 発行日 2021-10 |
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| ファイル公開日 | ||||||||||||||
| 日付 | 2023-10-01 | |||||||||||||
| 日付タイプ | Available | |||||||||||||
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Cite as
Bae, Hansin, Sasai, Kensuke, Suzuki, Haruka, Toyoda, Hirotaka, 2021, High-speed deposition of graphite-like carbon film by Ar/C6H6 surface-wave plasma with high-voltage pulse biasing: Elsevier, 110429– p.
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