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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

High-speed deposition of graphite-like carbon film by Ar/C6H6 surface-wave plasma with high-voltage pulse biasing

http://hdl.handle.net/2237/0002002045
http://hdl.handle.net/2237/0002002045
2f66e2af-d6c1-49ae-a735-f85fda272821
名前 / ファイル ライセンス アクション
Final_Version_bae.pdf Final_Version_bae.pdf (985 KB)
 Download is available from 2023/9/30.
Item type itemtype_ver1(1)
公開日 2022-02-08
タイトル
タイトル High-speed deposition of graphite-like carbon film by Ar/C6H6 surface-wave plasma with high-voltage pulse biasing
言語 en
著者 Bae, Hansin

× Bae, Hansin

en Bae, Hansin

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Sasai, Kensuke

× Sasai, Kensuke

en Sasai, Kensuke

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Suzuki, Haruka

× Suzuki, Haruka

en Suzuki, Haruka

Search repository
Toyoda, Hirotaka

× Toyoda, Hirotaka

en Toyoda, Hirotaka

Search repository
アクセス権
アクセス権 embargoed access
アクセス権URI http://purl.org/coar/access_right/c_f1cf
権利
言語 en
権利情報 © 2021. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/
キーワード
主題Scheme Other
主題 PECVD
キーワード
主題Scheme Other
主題 Carbon
キーワード
主題Scheme Other
主題 Conductive carbon film
キーワード
主題Scheme Other
主題 Microwave plasma
キーワード
主題Scheme Other
主題 Graphite-like carbon
内容記述
内容記述 A method for graphite-like carbon (GLC) deposition using Ar/C6H6 surface-wave plasma (SWP) is proposed. Characteristic of the SWP, i.e., high plasma density with wide spatial uniformity realized uniform carbon film deposition at high deposition rates. To increase sp^2 ratio in carbon films, a pulsed negative bias voltage up to ~2 kV is applied to a substrate. Conductive carbon films of low sheet resistances below ~10^2 Ω/sq is achieved at high deposition rates up to ~6 nm/s with good spatial uniformity (5%) in an area of ~183 cm^2. Film structure is evaluated by Raman spectroscopy, Fourier-transform infra-red spectroscopy, X-ray diffraction, X-ray photoelectron spectroscopy, scanning transmission electron microscopy and electron energy loss spectroscopy. At high negative bias voltages, sp^2-rich with reduced hydrogen content of the film is observed.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 Elsevier
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ AM
出版タイプResource http://purl.org/coar/version/c_ab4af688f83e57aa
関連情報
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1016/j.vacuum.2021.110429
収録物識別子
収録物識別子タイプ PISSN
収録物識別子 0042-207X
書誌情報 en : Vacuum

巻 192, p. 110429, 発行日 2021-10
ファイル公開日
日付 2023-10-01
日付タイプ Available
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