{"_buckets": {"deposit": "6f0dc4a4-5ee4-4b2e-8318-c265682e33bd"}, "_deposit": {"id": "21444", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "21444"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00021444", "sets": ["322"]}, "author_link": ["62274", "62275", "62276", "62277", "62278", "62279", "62280", "62281", "62282", "62283", "62284", "62285"], "item_10_alternative_title_19": {"attribute_name": "その他のタイトル", "attribute_value_mlt": [{"subitem_alternative_title": "Photoemission Study of Chemical Bonding Features at Metal/GeO_2 Interfaces", "subitem_alternative_title_language": "en"}]}, "item_10_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2011-06-27", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "114", "bibliographicPageEnd": "68", "bibliographicPageStart": "63", "bibliographicVolumeNumber": "111", "bibliographic_titles": [{"bibliographic_title": "電子情報通信学会技術研究報告. SDM, シリコン材料・デバイス", "bibliographic_titleLang": "ja"}]}]}, "item_10_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "熱酸化により形成したGeO_2/Ge(100)界面および金属(Al,AuおよびPt)薄膜形成後のGeO_2との界面化学結合状態をXPS分析により評価した。室温のAl蒸着において、GeO_2初期膜厚(\u003e〜1nm)に関わらず、厚さ〜1nm程度GeO_2が還元されることが明らかになった。初期GeO_2膜厚が1.0nm程度の場合にはGeO_2からAlへの酸素原子の拡散が支配的であり、GeO_2膜厚が1.9nm以上の場合は酸素原子拡散に加えてAl-Ge結合の形成が明瞭に観測された。また、極薄AuおよびPtを熱酸化GeO_2上に堆積した場合、金属/GeO_2界面に熱酸化GeO_2/Ge界面と同等量のサブオキサイド成分(GeO_x:0\u003cx\u003c2)の形成を確認した。", "subitem_description_language": "ja", "subitem_description_type": "Abstract"}, {"subitem_description": "We have investigated chemical bonding features at thermally-grown GeO_2/Ge(100) and metals (Al, Au and Pt)/GeO_2 interfaces by using high-resolution X-ray photoelectron spectroscopy (XPS). After the Al evaporation on GeO_2 thicker than 1.9nm initially, a reduction of GeO_2 accompanied with the generation of Al-Ge bonds was observed near the interface between Al and GeO_2. From the deconvolution of measured Ge3ds/2 spectra taken after physical vapor deposition of Au- and Pt-ultrathin films on thermally-grown GeO_2, we have confirmed the formation of Ge sub-oxide components (GeO_x 0\u003cx\u003c2) at the metal/GeO_2 interfaces being quantitatively comparable to sub-oxides at the thermally-grown GeO_2/Ge(100) interface.", "subitem_description_language": "en", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "URI", "subitem_identifier_uri": "http://ci.nii.ac.jp/naid/110008800857/"}, {"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/23574"}]}, "item_10_publisher_32": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "一般社団法人電子情報通信学会", "subitem_publisher_language": "ja"}]}, "item_10_relation_43": {"attribute_name": "関連情報", "attribute_value_mlt": [{"subitem_relation_type": "isVersionOf", "subitem_relation_type_id": {"subitem_relation_type_id_text": "http://ci.nii.ac.jp/naid/110008800857/", "subitem_relation_type_select": "URI"}}]}, "item_10_rights_12": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "(c)一般社団法人電子情報通信学会 本文データは学協会の許諾に基づきCiNiiから複製したものである", "subitem_rights_language": "ja"}]}, "item_10_select_15": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "09135685", "subitem_source_identifier_type": "PISSN"}]}, "item_1615787544753": {"attribute_name": "出版タイプ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "open access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_abf2"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "松井, 真史", "creatorNameLang": "ja"}], "nameIdentifiers": [{"nameIdentifier": "62274", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "藤岡, 知宏", "creatorNameLang": "ja"}], "nameIdentifiers": [{"nameIdentifier": "62275", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "大田, 晃生", "creatorNameLang": "ja"}], "nameIdentifiers": [{"nameIdentifier": "62276", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "村上, 秀樹", "creatorNameLang": "ja"}], "nameIdentifiers": [{"nameIdentifier": "62277", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "東, 清一郎", "creatorNameLang": "ja"}], "nameIdentifiers": [{"nameIdentifier": "62278", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "宮崎, 誠一", "creatorNameLang": "ja"}], "nameIdentifiers": [{"nameIdentifier": "62279", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Matsui, Masafumi", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "62280", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Fujioka, Tomohiro", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "62281", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Ohta, Akio", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "62282", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Murakami, Hideki", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "62283", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Higashi, Seiichiro", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "62284", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Miyazaki, Seiichi", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "62285", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-21"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "110008800857.pdf", "filesize": [{"value": "760.7 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 760700.0, "url": {"label": "110008800857.pdf", "objectType": "fulltext", "url": "https://nagoya.repo.nii.ac.jp/record/21444/files/110008800857.pdf"}, "version_id": "1e2e0c16-e10d-491c-be08-32ff66373b1e"}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "Geチャネル", "subitem_subject_scheme": "Other"}, {"subitem_subject": "サブオキサイド", "subitem_subject_scheme": "Other"}, {"subitem_subject": "界面反応", "subitem_subject_scheme": "Other"}, {"subitem_subject": "化学結合状態", "subitem_subject_scheme": "Other"}, {"subitem_subject": "X線光電子分光法", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Ge-channel", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Sub-oxide", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Interfacial Reaction", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Chemical Bonding Features", "subitem_subject_scheme": "Other"}, {"subitem_subject": "X-ray Photoelectron Spectroscopy (XPS)", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "金属/GeO_2界面における化学結合状態の光電子分光分析(ゲート絶縁薄膜,容量膜,機能膜及びメモリ技術)", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "金属/GeO_2界面における化学結合状態の光電子分光分析(ゲート絶縁薄膜,容量膜,機能膜及びメモリ技術)", "subitem_title_language": "ja"}]}, "item_type_id": "10", "owner": "1", "path": ["322"], "permalink_uri": "http://hdl.handle.net/2237/23574", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2016-02-24"}, "publish_date": "2016-02-24", "publish_status": "0", "recid": "21444", "relation": {}, "relation_version_is_last": true, "title": ["金属/GeO_2界面における化学結合状態の光電子分光分析(ゲート絶縁薄膜,容量膜,機能膜及びメモリ技術)"], "weko_shared_id": -1}