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Reduction in Mg Ion Implantation Damage and GaN Direct Growth on SiC Substrate for Vertical Power Device Applications
http://hdl.handle.net/2237/24277
http://hdl.handle.net/2237/24277588add35-6b5a-40c2-b899-1f66c5bd46e8
名前 / ファイル | ライセンス | アクション |
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k11461_abstract.pdf (512.5 kB)
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k11461_thesis.pdf (3.6 MB)
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k11461_review.pdf (312.3 kB)
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Item type | 学位論文 / Thesis or Dissertation(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2016-06-01 | |||||
タイトル | ||||||
タイトル | Reduction in Mg Ion Implantation Damage and GaN Direct Growth on SiC Substrate for Vertical Power Device Applications | |||||
言語 | en | |||||
その他のタイトル | ||||||
その他のタイトル | 縦型パワーデバイス応用のためのMgイオン注入ダメージの低減及びSiC基板へのGaN直接成長に関する研究 | |||||
言語 | ja | |||||
著者 |
Sun, Zheng
× Sun, Zheng× 孫, 政 |
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アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_db06 | |||||
タイプ | doctoral thesis | |||||
書誌情報 |
発行日 2016-03-25 |
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学位名 | ||||||
言語 | ja | |||||
学位名 | 博士(工学) | |||||
学位授与機関 | ||||||
学位授与機関識別子Scheme | kakenhi | |||||
学位授与機関識別子 | 13901 | |||||
言語 | ja | |||||
学位授与機関名 | 名古屋大学 | |||||
言語 | en | |||||
学位授与機関名 | Nagoya University | |||||
学位授与年度 | ||||||
学位授与年度 | 2015 | |||||
学位授与年月日 | ||||||
学位授与年月日 | 2016-03-25 | |||||
学位授与番号 | ||||||
学位授与番号 | 甲第11461号 | |||||
著者版フラグ | ||||||
値 | ETD | |||||
URI | ||||||
識別子 | http://hdl.handle.net/2237/24277 | |||||
識別子タイプ | HDL |