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Dynamics of E-H mode transition in high-pressure RF inductively coupled plasmas
http://hdl.handle.net/2237/6794
http://hdl.handle.net/2237/6794fd1e5dd6-ed77-43e3-82bc-01f2f4786fd7
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
01420438.pdf (470.4 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2006-08-03 | |||||
| タイトル | ||||||
| タイトル | Dynamics of E-H mode transition in high-pressure RF inductively coupled plasmas | |||||
| 言語 | en | |||||
| 著者 |
Razzak, M. Abdur
× Razzak, M. Abdur× Takamura, Shuichi× Uesugi, Yoshihiko |
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| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 権利 | ||||||
| 言語 | en | |||||
| 権利情報 | Copyright © 2005 IEEE. Reprinted from (relevant publication info). This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | E-H mode transition dynamics | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | high-speed imaging | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | inductively coupled plasma | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Capacitive (E) to inductive (H) mode transition dynamics in radio frequency (RF) argon inductively coupled plasmas (ICPs) with up to atmospheric pressure is studied experimentally. High-speed imaging (13500 fps) is performed to investigate the transition dynamics, and to estimate the characteristic time scale of E-H mode transition. The effect of diatomic gas inclusion (here N2) on the E-H mode transition dynamics is also discussed. | |||||
| 言語 | en | |||||
| 出版者 | ||||||
| 出版者 | IEEE | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 出版タイプ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1109/TPS.2005.845019 | |||||
| 書誌情報 |
en : IEEE Transactions on Plasma Science 巻 33, 号 2, p. 284-285, 発行日 2005-04 |
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| フォーマット | ||||||
| 値 | application/pdf | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
| URI | ||||||
| 識別子 | http://hdl.handle.net/2237/6794 | |||||
| 識別子タイプ | HDL | |||||
