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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas

http://hdl.handle.net/2237/6989
http://hdl.handle.net/2237/6989
71913808-1183-4459-92c6-b8317d472c04
名前 / ファイル ライセンス アクション
ApplPhysLett_70_1375.pdf ApplPhysLett_70_1375.pdf (82.0 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2006-10-20
タイトル
タイトル Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas
言語 en
著者 Sasaki, K.

× Sasaki, K.

WEKO 13733

en Sasaki, K.

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Kawai, Y.

× Kawai, Y.

WEKO 13734

en Kawai, Y.

Search repository
Kadota, K.

× Kadota, K.

WEKO 13735

en Kadota, K.

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 Copyright (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
抄録
内容記述 Absolute densities of fluorine (F) atoms at the ground state (2p^5 ^2P°) were measured in helicon-wave excited high-density CF_4 plasmas by vacuum ultraviolet (VUV) absorption spectroscopy. By employing an electron cyclotron resonance CF_4 plasma as a light source in the VUV wavelength range, an absorption spectroscopy system with no vacuum windows was constructed. As a result, the density of F atoms was approximately 1*10^13 cm^-3 for an rf power of 1 kW and a CF_4 gas pressure of 2.5 mTorr, which was one-order higher than the density of CF_x radicals and was one-order lower than the density of the parent gas.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 American Institute of Physics
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1063/1.118582
ISSN
収録物識別子タイプ PISSN
収録物識別子 0003-6951
書誌情報 en : Applied Physics Letters

巻 70, 号 11, p. 1375-1377, 発行日 1997-03-17
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/6989
識別子タイプ HDL
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