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Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas
http://hdl.handle.net/2237/6989
http://hdl.handle.net/2237/698971913808-1183-4459-92c6-b8317d472c04
名前 / ファイル | ライセンス | アクション |
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ApplPhysLett_70_1375.pdf (82.0 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2006-10-20 | |||||
タイトル | ||||||
タイトル | Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas | |||||
言語 | en | |||||
著者 |
Sasaki, K.
× Sasaki, K.× Kawai, Y.× Kadota, K. |
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アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
権利 | ||||||
言語 | en | |||||
権利情報 | Copyright (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. | |||||
抄録 | ||||||
内容記述 | Absolute densities of fluorine (F) atoms at the ground state (2p^5 ^2P°) were measured in helicon-wave excited high-density CF_4 plasmas by vacuum ultraviolet (VUV) absorption spectroscopy. By employing an electron cyclotron resonance CF_4 plasma as a light source in the VUV wavelength range, an absorption spectroscopy system with no vacuum windows was constructed. As a result, the density of F atoms was approximately 1*10^13 cm^-3 for an rf power of 1 kW and a CF_4 gas pressure of 2.5 mTorr, which was one-order higher than the density of CF_x radicals and was one-order lower than the density of the parent gas. | |||||
言語 | en | |||||
内容記述タイプ | Abstract | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | American Institute of Physics | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1063/1.118582 | |||||
ISSN | ||||||
収録物識別子タイプ | PISSN | |||||
収録物識別子 | 0003-6951 | |||||
書誌情報 |
en : Applied Physics Letters 巻 70, 号 11, p. 1375-1377, 発行日 1997-03-17 |
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application/pdf | ||||||
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値 | publisher | |||||
URI | ||||||
識別子 | http://hdl.handle.net/2237/6989 | |||||
識別子タイプ | HDL |