{"_buckets": {"deposit": "02c9714c-5760-4e09-8e46-37ca7e6bc6ba"}, "_deposit": {"id": "5384", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "5384"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00005384"}, "item_10_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "1997-03-17", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "11", "bibliographicPageEnd": "1377", "bibliographicPageStart": "1375", "bibliographicVolumeNumber": "70", "bibliographic_titles": [{"bibliographic_title": "Applied Physics Letters"}]}]}, "item_10_description_4": {"attribute_name": "\u6284\u9332", "attribute_value_mlt": [{"subitem_description": "Absolute densities of fluorine (F) atoms at the ground state (2p^5 ^2P\u00b0) were measured in\nhelicon-wave excited high-density CF_4 plasmas by vacuum ultraviolet (VUV) absorption\nspectroscopy. By employing an electron cyclotron resonance CF_4 plasma as a light source in the\nVUV wavelength range, an absorption spectroscopy system with no vacuum windows was\nconstructed. As a result, the density of F atoms was approximately 1*10^13 cm^-3 for an rf power\nof 1 kW and a CF_4 gas pressure of 2.5 mTorr, which was one-order higher than the density of\nCF_x radicals and was one-order lower than the density of the parent gas.", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/6989"}]}, "item_10_publisher_32": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "American Institute of Physics"}]}, "item_10_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type_id": {"subitem_relation_type_id_text": "http://dx.doi.org/10.1063/1.118582", "subitem_relation_type_select": "DOI"}}]}, "item_10_rights_12": {"attribute_name": "\u6a29\u5229", "attribute_value_mlt": [{"subitem_rights": "Copyright (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics."}]}, "item_10_select_15": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0003-6951", "subitem_source_identifier_type": "ISSN"}]}, "item_10_text_14": {"attribute_name": "\u30d5\u30a9\u30fc\u30de\u30c3\u30c8", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Sasaki, K."}], "nameIdentifiers": [{"nameIdentifier": "13733", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kawai, Y."}], "nameIdentifiers": [{"nameIdentifier": "13734", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kadota, K."}], "nameIdentifiers": [{"nameIdentifier": "13735", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-19"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "ApplPhysLett_70_1375.pdf", "filesize": [{"value": "82.0 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 82000.0, "url": {"label": "ApplPhysLett_70_1375.pdf", "url": "https://nagoya.repo.nii.ac.jp/record/5384/files/ApplPhysLett_70_1375.pdf"}, "version_id": "d6e7e04b-f40a-4ff0-9bde-22058a80cadf"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas"}]}, "item_type_id": "10", "owner": "1", "path": ["320/321/322"], "permalink_uri": "http://hdl.handle.net/2237/6989", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_value": "2006-10-20"}, "publish_date": "2006-10-20", "publish_status": "0", "recid": "5384", "relation": {}, "relation_version_is_last": true, "title": ["Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas"], "weko_shared_id": 3}