WEKO3
アイテム
{"_buckets": {"deposit": "02c9714c-5760-4e09-8e46-37ca7e6bc6ba"}, "_deposit": {"id": "5384", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "5384"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00005384", "sets": ["322"]}, "author_link": ["13733", "13734", "13735"], "item_10_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "1997-03-17", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "11", "bibliographicPageEnd": "1377", "bibliographicPageStart": "1375", "bibliographicVolumeNumber": "70", "bibliographic_titles": [{"bibliographic_title": "Applied Physics Letters", "bibliographic_titleLang": "en"}]}]}, "item_10_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "Absolute densities of fluorine (F) atoms at the ground state (2p^5 ^2P°) were measured in helicon-wave excited high-density CF_4 plasmas by vacuum ultraviolet (VUV) absorption spectroscopy. By employing an electron cyclotron resonance CF_4 plasma as a light source in the VUV wavelength range, an absorption spectroscopy system with no vacuum windows was constructed. As a result, the density of F atoms was approximately 1*10^13 cm^-3 for an rf power of 1 kW and a CF_4 gas pressure of 2.5 mTorr, which was one-order higher than the density of CF_x radicals and was one-order lower than the density of the parent gas.", "subitem_description_language": "en", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/6989"}]}, "item_10_publisher_32": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "American Institute of Physics", "subitem_publisher_language": "en"}]}, "item_10_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isVersionOf", "subitem_relation_type_id": {"subitem_relation_type_id_text": "https://doi.org/10.1063/1.118582", "subitem_relation_type_select": "DOI"}}]}, "item_10_rights_12": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "Copyright (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.", "subitem_rights_language": "en"}]}, "item_10_select_15": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0003-6951", "subitem_source_identifier_type": "PISSN"}]}, "item_10_text_14": {"attribute_name": "フォーマット", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}]}, "item_1615787544753": {"attribute_name": "出版タイプ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "open access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_abf2"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Sasaki, K.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "13733", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kawai, Y.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "13734", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kadota, K.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "13735", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-19"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "ApplPhysLett_70_1375.pdf", "filesize": [{"value": "82.0 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 82000.0, "url": {"label": "ApplPhysLett_70_1375.pdf", "objectType": "fulltext", "url": "https://nagoya.repo.nii.ac.jp/record/5384/files/ApplPhysLett_70_1375.pdf"}, "version_id": "d6e7e04b-f40a-4ff0-9bde-22058a80cadf"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas", "subitem_title_language": "en"}]}, "item_type_id": "10", "owner": "1", "path": ["322"], "permalink_uri": "http://hdl.handle.net/2237/6989", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2006-10-20"}, "publish_date": "2006-10-20", "publish_status": "0", "recid": "5384", "relation": {}, "relation_version_is_last": true, "title": ["Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas"], "weko_shared_id": -1}
Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas
http://hdl.handle.net/2237/6989
http://hdl.handle.net/2237/698971913808-1183-4459-92c6-b8317d472c04
名前 / ファイル | ライセンス | アクション |
---|---|---|
![]() |
|
Item type | 学術雑誌論文 / Journal Article(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2006-10-20 | |||||
タイトル | ||||||
タイトル | Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas | |||||
言語 | en | |||||
著者 |
Sasaki, K.
× Sasaki, K.× Kawai, Y.× Kadota, K. |
|||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
権利 | ||||||
言語 | en | |||||
権利情報 | Copyright (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. | |||||
抄録 | ||||||
内容記述 | Absolute densities of fluorine (F) atoms at the ground state (2p^5 ^2P°) were measured in helicon-wave excited high-density CF_4 plasmas by vacuum ultraviolet (VUV) absorption spectroscopy. By employing an electron cyclotron resonance CF_4 plasma as a light source in the VUV wavelength range, an absorption spectroscopy system with no vacuum windows was constructed. As a result, the density of F atoms was approximately 1*10^13 cm^-3 for an rf power of 1 kW and a CF_4 gas pressure of 2.5 mTorr, which was one-order higher than the density of CF_x radicals and was one-order lower than the density of the parent gas. | |||||
言語 | en | |||||
内容記述タイプ | Abstract | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | American Institute of Physics | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1063/1.118582 | |||||
ISSN | ||||||
収録物識別子タイプ | PISSN | |||||
収録物識別子 | 0003-6951 | |||||
書誌情報 |
en : Applied Physics Letters 巻 70, 号 11, p. 1375-1377, 発行日 1997-03-17 |
|||||
フォーマット | ||||||
application/pdf | ||||||
著者版フラグ | ||||||
値 | publisher | |||||
URI | ||||||
識別子 | http://hdl.handle.net/2237/6989 | |||||
識別子タイプ | HDL |