{"_buckets": {"deposit": "14028b5b-e4fa-4b71-8e73-178f268c99f4"}, "_deposit": {"id": "5427", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "5427"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00005427", "sets": ["322"]}, "author_link": ["13920", "13921", "13922", "13923"], "item_10_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "1997-12-15", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "12", "bibliographicPageEnd": "5943", "bibliographicPageStart": "5938", "bibliographicVolumeNumber": "82", "bibliographic_titles": [{"bibliographic_title": "Journal of Applied Physics", "bibliographic_titleLang": "en"}]}]}, "item_10_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "Reaction processes of fluorine (F) atoms in high-density carbon–tetrafluoride (CF_4) plasmas were investigated using vacuum ultraviolet absorption spectroscopy. A scaling law n_F^∝(n_en_{CF_4})^{0.5– 0.7} was found experimentally, where n_F is the F atom density and n_e and n_{CF_4} stand for the electron and parent gas (CF_4) densities, respectively. The lifetime measurement in the afterglow showed that the decay curve of the F atom density was composed of two components: a rapid decay in the initial afterglow and an exponential decrease in the late afterglow. The decay time constant in the initial afterglow τ_1 satisfied the scaling law τ_1^∝(n_en_{CF_4})^{-(0.3– 0.4)}, which is a consistent relationship with the scaling law for the F atom density. The two scaling laws and the lifetimes of CFx radicals suggest that the major loss process of F atoms in the initial afterglow is the reaction with CF_x radicals (probably, x=3) on the wall surface. The loss process in the late afterglow was simple diffusion to the wall surface. The surface loss probability of F atoms on the chamber wall was evaluated from the decay time constant in the late afterglow, and was on the order of 10^-3.", "subitem_description_language": "en", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/7031"}]}, "item_10_publisher_32": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "American Institute of Physics", "subitem_publisher_language": "en"}]}, "item_10_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isVersionOf", "subitem_relation_type_id": {"subitem_relation_type_id_text": "https://doi.org/10.1063/1.366495", "subitem_relation_type_select": "DOI"}}]}, "item_10_rights_12": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "Copyright (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.", "subitem_rights_language": "en"}]}, "item_10_select_15": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0021-8979", "subitem_source_identifier_type": "PISSN"}]}, "item_10_text_14": {"attribute_name": "フォーマット", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}]}, "item_1615787544753": {"attribute_name": "出版タイプ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "open access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_abf2"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Sasaki, K.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "13920", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kawai, Y.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "13921", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Suzuki, C.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "13922", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kadota, K.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "13923", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-19"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "JApplPhys_82_5938.pdf", "filesize": [{"value": "129.9 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 129900.0, "url": {"label": "JApplPhys_82_5938.pdf", "objectType": "fulltext", "url": "https://nagoya.repo.nii.ac.jp/record/5427/files/JApplPhys_82_5938.pdf"}, "version_id": "3142e145-9463-4c6e-83ea-71bb1026343c"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Kinetics of fluorine atoms in high-density carbon–tetrafluoride plasmas", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Kinetics of fluorine atoms in high-density carbon–tetrafluoride plasmas", "subitem_title_language": "en"}]}, "item_type_id": "10", "owner": "1", "path": ["322"], "permalink_uri": "http://hdl.handle.net/2237/7031", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2006-10-24"}, "publish_date": "2006-10-24", "publish_status": "0", "recid": "5427", "relation": {}, "relation_version_is_last": true, "title": ["Kinetics of fluorine atoms in high-density carbon–tetrafluoride plasmas"], "weko_shared_id": -1}