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{"_buckets": {"deposit": "14028b5b-e4fa-4b71-8e73-178f268c99f4"}, "_deposit": {"id": "5427", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "5427"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00005427", "sets": ["322"]}, "author_link": ["13920", "13921", "13922", "13923"], "item_10_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "1997-12-15", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "12", "bibliographicPageEnd": "5943", "bibliographicPageStart": "5938", "bibliographicVolumeNumber": "82", "bibliographic_titles": [{"bibliographic_title": "Journal of Applied Physics", "bibliographic_titleLang": "en"}]}]}, "item_10_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "Reaction processes of fluorine (F) atoms in high-density carbon–tetrafluoride (CF_4) plasmas were investigated using vacuum ultraviolet absorption spectroscopy. A scaling law n_F^∝(n_en_{CF_4})^{0.5– 0.7} was found experimentally, where n_F is the F atom density and n_e and n_{CF_4} stand for the electron and parent gas (CF_4) densities, respectively. The lifetime measurement in the afterglow showed that the decay curve of the F atom density was composed of two components: a rapid decay in the initial afterglow and an exponential decrease in the late afterglow. The decay time constant in the initial afterglow τ_1 satisfied the scaling law τ_1^∝(n_en_{CF_4})^{-(0.3– 0.4)}, which is a consistent relationship with the scaling law for the F atom density. The two scaling laws and the lifetimes of CFx radicals suggest that the major loss process of F atoms in the initial afterglow is the reaction with CF_x radicals (probably, x=3) on the wall surface. The loss process in the late afterglow was simple diffusion to the wall surface. The surface loss probability of F atoms on the chamber wall was evaluated from the decay time constant in the late afterglow, and was on the order of 10^-3.", "subitem_description_language": "en", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/7031"}]}, "item_10_publisher_32": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "American Institute of Physics", "subitem_publisher_language": "en"}]}, "item_10_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isVersionOf", "subitem_relation_type_id": {"subitem_relation_type_id_text": "https://doi.org/10.1063/1.366495", "subitem_relation_type_select": "DOI"}}]}, "item_10_rights_12": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "Copyright (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.", "subitem_rights_language": "en"}]}, "item_10_select_15": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0021-8979", "subitem_source_identifier_type": "PISSN"}]}, "item_10_text_14": {"attribute_name": "フォーマット", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}]}, "item_1615787544753": {"attribute_name": "出版タイプ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "open access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_abf2"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Sasaki, K.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "13920", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kawai, Y.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "13921", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Suzuki, C.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "13922", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kadota, K.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "13923", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-19"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "JApplPhys_82_5938.pdf", "filesize": [{"value": "129.9 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 129900.0, "url": {"label": "JApplPhys_82_5938.pdf", "objectType": "fulltext", "url": "https://nagoya.repo.nii.ac.jp/record/5427/files/JApplPhys_82_5938.pdf"}, "version_id": "3142e145-9463-4c6e-83ea-71bb1026343c"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Kinetics of fluorine atoms in high-density carbon–tetrafluoride plasmas", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Kinetics of fluorine atoms in high-density carbon–tetrafluoride plasmas", "subitem_title_language": "en"}]}, "item_type_id": "10", "owner": "1", "path": ["322"], "permalink_uri": "http://hdl.handle.net/2237/7031", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2006-10-24"}, "publish_date": "2006-10-24", "publish_status": "0", "recid": "5427", "relation": {}, "relation_version_is_last": true, "title": ["Kinetics of fluorine atoms in high-density carbon–tetrafluoride plasmas"], "weko_shared_id": -1}
  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Kinetics of fluorine atoms in high-density carbon–tetrafluoride plasmas

http://hdl.handle.net/2237/7031
http://hdl.handle.net/2237/7031
cef42b44-b65e-4449-ad6a-6168c1ad415a
名前 / ファイル ライセンス アクション
JApplPhys_82_5938.pdf JApplPhys_82_5938.pdf (129.9 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2006-10-24
タイトル
タイトル Kinetics of fluorine atoms in high-density carbon–tetrafluoride plasmas
言語 en
著者 Sasaki, K.

× Sasaki, K.

WEKO 13920

en Sasaki, K.

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Kawai, Y.

× Kawai, Y.

WEKO 13921

en Kawai, Y.

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Suzuki, C.

× Suzuki, C.

WEKO 13922

en Suzuki, C.

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Kadota, K.

× Kadota, K.

WEKO 13923

en Kadota, K.

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 Copyright (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
抄録
内容記述 Reaction processes of fluorine (F) atoms in high-density carbon–tetrafluoride (CF_4) plasmas were investigated using vacuum ultraviolet absorption spectroscopy. A scaling law n_F^∝(n_en_{CF_4})^{0.5– 0.7} was found experimentally, where n_F is the F atom density and n_e and n_{CF_4} stand for the electron and parent gas (CF_4) densities, respectively. The lifetime measurement in the afterglow showed that the decay curve of the F atom density was composed of two components: a rapid decay in the initial afterglow and an exponential decrease in the late afterglow. The decay time constant in the initial afterglow τ_1 satisfied the scaling law τ_1^∝(n_en_{CF_4})^{-(0.3– 0.4)}, which is a consistent relationship with the scaling law for the F atom density. The two scaling laws and the lifetimes of CFx radicals suggest that the major loss process of F atoms in the initial afterglow is the reaction with CF_x radicals (probably, x=3) on the wall surface. The loss process in the late afterglow was simple diffusion to the wall surface. The surface loss probability of F atoms on the chamber wall was evaluated from the decay time constant in the late afterglow, and was on the order of 10^-3.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 American Institute of Physics
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1063/1.366495
ISSN
収録物識別子タイプ PISSN
収録物識別子 0021-8979
書誌情報 en : Journal of Applied Physics

巻 82, 号 12, p. 5938-5943, 発行日 1997-12-15
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/7031
識別子タイプ HDL
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