{"_buckets": {"deposit": "14028b5b-e4fa-4b71-8e73-178f268c99f4"}, "_deposit": {"id": "5427", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "5427"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00005427"}, "item_10_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "1997-12-15", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "12", "bibliographicPageEnd": "5943", "bibliographicPageStart": "5938", "bibliographicVolumeNumber": "82", "bibliographic_titles": [{"bibliographic_title": "Journal of Applied Physics"}]}]}, "item_10_description_4": {"attribute_name": "\u6284\u9332", "attribute_value_mlt": [{"subitem_description": "Reaction processes of fluorine (F) atoms in high-density carbon\u2013tetrafluoride (CF_4) plasmas were investigated using vacuum ultraviolet absorption spectroscopy. A scaling law n_F^\u221d(n_en_{CF_4})^{0.5\u2013 0.7} was found experimentally, where n_F is the F atom density and n_e and n_{CF_4} stand for the electron and parent gas (CF_4) densities, respectively. The lifetime measurement in the afterglow showed that the decay curve of the F atom density was composed of two components: a rapid decay in the initial afterglow and an exponential decrease in the late afterglow. The decay time constant in the initial afterglow \u03c4_1 satisfied the scaling law \u03c4_1^\u221d(n_en_{CF_4})^{-(0.3\u2013 0.4)}, which is a consistent relationship with the scaling law for the F atom density. The two scaling laws and the lifetimes of CFx radicals suggest that the major loss process of F atoms in the initial afterglow is the reaction with CF_x radicals (probably, x=3) on the wall surface. The loss process in the late afterglow was simple diffusion to the wall surface. The surface loss probability of F atoms on the chamber wall was evaluated from the decay time constant in the late afterglow, and was on the order of 10^-3.", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/7031"}]}, "item_10_publisher_32": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "American Institute of Physics"}]}, "item_10_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type_id": {"subitem_relation_type_id_text": "http://dx.doi.org/10.1063/1.366495", "subitem_relation_type_select": "DOI"}}]}, "item_10_rights_12": {"attribute_name": "\u6a29\u5229", "attribute_value_mlt": [{"subitem_rights": "Copyright (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics."}]}, "item_10_select_15": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0021-8979", "subitem_source_identifier_type": "ISSN"}]}, "item_10_text_14": {"attribute_name": "\u30d5\u30a9\u30fc\u30de\u30c3\u30c8", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Sasaki, K."}], "nameIdentifiers": [{"nameIdentifier": "13920", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kawai, Y."}], "nameIdentifiers": [{"nameIdentifier": "13921", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Suzuki, C."}], "nameIdentifiers": [{"nameIdentifier": "13922", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kadota, K."}], "nameIdentifiers": [{"nameIdentifier": "13923", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-19"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "JApplPhys_82_5938.pdf", "filesize": [{"value": "129.9 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 129900.0, "url": {"label": "JApplPhys_82_5938.pdf", "url": "https://nagoya.repo.nii.ac.jp/record/5427/files/JApplPhys_82_5938.pdf"}, "version_id": "3142e145-9463-4c6e-83ea-71bb1026343c"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Kinetics of fluorine atoms in high-density carbon\u2013tetrafluoride plasmas", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "Kinetics of fluorine atoms in high-density carbon\u2013tetrafluoride plasmas"}]}, "item_type_id": "10", "owner": "1", "path": ["320/321/322"], "permalink_uri": "http://hdl.handle.net/2237/7031", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_value": "2006-10-24"}, "publish_date": "2006-10-24", "publish_status": "0", "recid": "5427", "relation": {}, "relation_version_is_last": true, "title": ["Kinetics of fluorine atoms in high-density carbon\u2013tetrafluoride plasmas"], "weko_shared_id": 3}