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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Principle and application of a thermal probe to reactive plasmas

http://hdl.handle.net/2237/7250
http://hdl.handle.net/2237/7250
36a00781-167c-4ff7-a9d3-e7adbf518165
名前 / ファイル ライセンス アクション
ApplPhysLett_80_3066.pdf ApplPhysLett_80_3066.pdf (171.6 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2007-01-15
タイトル
タイトル Principle and application of a thermal probe to reactive plasmas
言語 en
著者 Stamate, E.

× Stamate, E.

WEKO 14921

en Stamate, E.

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Sugai, H.

× Sugai, H.

WEKO 14922

en Sugai, H.

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Ohe, K.

× Ohe, K.

WEKO 14923

en Ohe, K.

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アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 Copyright (2002) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
抄録
内容記述 A thermal probe for plasma diagnostics is introduced. The method is based upon measuring the equilibrium temperature of a conducting sphere as a function of its applied bias. The resulting temperature–voltage characteristic is processed using a theoretical model that accounts for charge and thermodynamic balance. The thermal probe is capable of detecting negative ions and shows sensitivity to certain chemical reactions. Measurements performed in Ar, Ar/SF_6, and O_2 show good agreement among the plasma parameters using thermal and Langmuir probes.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 American Institute of Physics
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1063/1.1473688
ISSN
収録物識別子タイプ PISSN
収録物識別子 0003-6951
書誌情報 en : Applied Physics Letters

巻 80, 号 17, p. 3066-3068, 発行日 2002-04-29
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/7250
識別子タイプ HDL
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