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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Role of atomic nitrogen during GaN growth by plasma-assisted molecular beam epitaxy revealed by appearance mass spectrometry

http://hdl.handle.net/2237/8775
http://hdl.handle.net/2237/8775
81542b28-31ca-4775-b607-cf79c5561d12
名前 / ファイル ライセンス アクション
AppPhysLett_90-172114.pdf AppPhysLett_90-172114.pdf (74.6 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2007-09-25
タイトル
タイトル Role of atomic nitrogen during GaN growth by plasma-assisted molecular beam epitaxy revealed by appearance mass spectrometry
言語 en
著者 Osaka, J.

× Osaka, J.

WEKO 19188

en Osaka, J.

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Kumar, Senthil M.

× Kumar, Senthil M.

WEKO 19189

en Kumar, Senthil M.

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Toyoda, H.

× Toyoda, H.

WEKO 19190

en Toyoda, H.

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Ishijima, T.

× Ishijima, T.

WEKO 19191

en Ishijima, T.

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Sugai, H.

× Sugai, H.

WEKO 19192

en Sugai, H.

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Mizutani, T.

× Mizutani, T.

WEKO 19193

en Mizutani, T.

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 Copyright (2007) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
抄録
内容記述 To identify the species which contribute to GaN growth, the authors investigated the discharge parameter (0.3–4.8 SCCM (SCCM denotes cubic centimeter per minute at STP), 150–400 W) dependences of the atomic N flux by appearance mass spectrometry and of the incorporated nitrogen atoms into GaN layers grown by plasma-assisted molecular beam epitaxy (PAMBE) using the rf-plasma source. Ion fluxes were also evaluated by ion current measurements. A good correlation between the supplied atomic N flux and the incorporated nitrogen flux was obtained under a wide range of plasma conditions. It was clarified that the atomic N plays a dominant role in the growth of GaN by PAMBE.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 American Institute of Physics
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1063/1.2734390
ISSN
収録物識別子タイプ PISSN
収録物識別子 0003-6951
書誌情報 en : APPLIED PHYSICS LETTERS

巻 90, 号 17, p. 172114-172114, 発行日 2007-04-23
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/8775
識別子タイプ HDL
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