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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Analytical Solution of the Continuous Cellular Automaton for Anisotropic Etching

http://hdl.handle.net/2237/11160
160d557f-a2d1-4c48-8459-12f80606a029
名前 / ファイル ライセンス アクション
getPDF_jsp.pdf getPDF_jsp.pdf (2.7 MB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2009-02-25
タイトル
タイトル Analytical Solution of the Continuous Cellular Automaton for Anisotropic Etching
著者 Gosálvez, Miguel A.

× Gosálvez, Miguel A.

WEKO 26845

Gosálvez, Miguel A.

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Xing, Yan

× Xing, Yan

WEKO 26846

Xing, Yan

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Sato, Kazuo

× Sato, Kazuo

WEKO 26847

Sato, Kazuo

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佐藤, 一雄

× 佐藤, 一雄

WEKO 26848

佐藤, 一雄

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権利
権利情報 Copyright © 2008 IEEE. Reprinted from Journal of Microelectromechanical Systems. v.17, n.2, 2008, p.410-431. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org.
キーワード
主題Scheme Other
主題 Anisotropic etching
キーワード
主題Scheme Other
主題 cellular automata (CA)
キーワード
主題Scheme Other
主題 simulation
キーワード
主題Scheme Other
主題 step flow
キーワード
主題Scheme Other
主題 surface processing
抄録
内容記述 The fabrication of micro- and nanoelectromechanical systems (MEMS/NEMS) is based on a wide variety of growth and etching technologies sequentially applied throughout process flows which may involve a dozen or more steps, their realistic simulation having become an essential part of the overall design. By focusing in the simulation of anisotropic etching as a complex example of microfabrication, in this paper, we show how to solve analytically the time evolution of the continuous cellular automaton method, thus providing a particularly suitable choice for the realization of realistic simulations for MEMS and NEMS applications. This paper presents a complete theoretical derivation of the analytical solution based on geometrical and kinetic aspects of step flow on any surface, including a new classification of the surface sites based on a mean-field treatment of the propagation of the steps. The results of the corresponding simulations are in good agreement with the experiments. The study can be seen as an example of a general procedure that is applicable to other interface propagation problems.
内容記述タイプ Abstract
出版者
出版者 IEEE
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
DOI
関連識別子
識別子タイプ DOI
関連識別子 https://doi.org/10.1109/JMEMS.2008.916339
ISSN
収録物識別子タイプ ISSN
収録物識別子 1057-7157
書誌情報 Journal of Microelectromechanical Systems

巻 17, 号 2, p. 410-431, 発行日 2008-04
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/11160
識別子タイプ HDL
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